METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE

• US 20110089811A1
• Filed: 12/27/2010
• Published: 04/21/2011
• Est. Priority Date: 12/28/2001
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Maruyama, Junya, Takayama, Toru, Yamazaki, Shunpei, Murakami, Masakazu
• Granted Patent: US 8,344,369 B2
• Time in Patent Office: Days
• US Class Current: 313/483
• CPC Class Codes: G02F 1/133305 Flexible substrates, e.g. plastics, organic film
• CPC Class Codes: G02F 1/1339 Gaskets; Spacers; Sealing of cells
• CPC Class Codes: G02F 1/13394 spacers regularly patterned on the cell subtrate, e.g. walls, pillars G02F1/133377 takes precedence
• CPC Class Codes: G02F 1/1341 Filling or closing of cells
• CPC Class Codes: G02F 1/1368 in which the switching element is a three-electrode device G02F1/136277 takes precedence
• CPC Class Codes: H01L 21/2007 Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer H01L21/2011 takes precedence; bonding of semiconductor wafers to semiconductor wafers for junction formation H01L21/187
• CPC Class Codes: H01L 21/67092 Apparatus for mechanical treatment or grinding or cutting, see the relevant groups in subclasses B24B or B28D
• CPC Class Codes: H01L 21/6835 using temporarily an auxiliary support
• CPC Class Codes: H01L 21/76251 using bonding techniques
• CPC Class Codes: H01L 2221/6835 used as a support during build up manufacturing of active devices
• CPC Class Codes: H01L 2221/68363 used in a transfer process involving transfer directly from an origin substrate to a target substrate without use of an intermediate handle substrate
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/1218 with a particular composition or structure of the substrate
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1259 Multistep manufacturing methods
• CPC Class Codes: H01L 27/1262 with a particular formation, treatment or coating of the substrate
• CPC Class Codes: H01L 27/1266 the substrate on which the devices are formed not being the final device substrate, e.g. using a temporary substrate
• CPC Class Codes: H01L 27/156 two-dimensional arrays
• CPC Class Codes: H01L 29/66757 Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
• CPC Class Codes: H01L 29/78603 characterised by the insulating substrate or support H01L29/78657 takes precedence
• CPC Class Codes: H01L 2924/30105 : Capacitance
• CPC Class Codes: H01L 2924/3025 : Electromagnetic shielding
• CPC Class Codes: H10K 2102/311 : Flexible OLED
• CPC Class Codes: H10K 59/12 : Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/1201 : Manufacture or treatment
• CPC Class Codes: H10K 59/1213 : the pixel elements being TFTs
• CPC Class Codes: H10K 59/123 : Connection of the pixel electrodes to the thin film transistors [TFT]
• CPC Class Codes: H10K 59/131 : Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: H10K 71/00 : Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/50 : Forming devices by joining two substrates together, e.g. lamination techniques
• CPC Class Codes: H10K 71/80 : using temporary substrates
• CPC Class Codes: H10K 77/111 : Flexible substrates
• CPC Class Codes: Y02E 10/549 : Organic PV cells

Abstract

The object of the invention is to provide a method for fabricating a semiconductor device having a peeled layer bonded to a base material with curvature. Particularly, the object is to provide a method for fabricating a display with curvature, more specifically, a light emitting device having an OLED bonded to a base material with curvature. An external force is applied to a support originally having curvature and elasticity, and the support is bonded to a peeled layer formed over a substrate. Then, when the substrate is peeled, the support returns into the original shape by the restoring force, and the peeled layer as well is curved along the shape of the support. Finally, a transfer object originally having curvature is bonded to the peeled layer, and then a device with a desired curvature is completed.

Claims

1. A vehicle, comprising:

a dash board; and

a display panel attached to the dash board, the display panel comprising a layer including a light emitting organic material,

wherein the display panel has a curved surface, a curvature radius of which is 50 cm to 200 cm.

2. A vehicle according to claim 1, wherein the display panel further comprises:

an adhesive on a first film having elasticity;

an oxide layer on the adhesive; and

a second film having elasticity opposed to the first film with the layer including the light emitting organic material interposed therebetween.

3. A vehicle according to claim 2,

wherein one of the first film and the second film comprises a material selected from the group consisting of polyethylene terephthalate, polyether sulfone, polyethylene naphthalate, polycarbonate, nylon, polyether ether ketone, polysulfone, polyetherimide, polyallylate, and polybutylene terephthalate.

4. A vehicle according to claim 1, wherein the display panel is an active matrix type.

5. A vehicle according to claim 1, wherein the vehicle is selected from the group consisting of an automobile, an aircraft, a train, and an electric railcar.

6. A vehicle, comprising:

a window; and

a display panel attached to the window, the display panel comprising a layer including a light emitting organic material,

wherein the display panel has a curved surface, a curvature radius of which is 50 cm to 200 cm.

7. A vehicle according to claim 6, wherein the display panel further comprises:

an adhesive on a first film having elasticity;

an oxide layer on the adhesive; and

a second film having elasticity opposed to the first film with the layer including the light emitting organic material interposed therebetween.

8. A vehicle according to claim 7,

wherein one of the first film and the second film comprises a material selected from the group consisting of polyethylene terephthalate, polyether sulfone, polyethylene naphthalate, polycarbonate, nylon, polyether ether ketone, polysulfone, polyetherimide, polyallylate, and polybutylene terephthalate.

9. A vehicle according to claim 6, wherein the display panel is an active matrix type.

10. A vehicle according to claim 6, wherein the vehicle is selected from the group consisting of an automobile, an aircraft, a train, and an electric railcar.

11. A vehicle comprising:

a pillar; and

a display panel attached to the pillar, the display panel comprising a layer including a light emitting organic material,

wherein the display panel has a curved surface, a curvature radius of which is 50 cm to 200 cm.

12. A vehicle according to claim 11, wherein the display panel further comprises:

an adhesive on a first film having elasticity;

an oxide layer on the adhesive; and

a second film having elasticity opposed to the first film with the layer including the light emitting organic material interposed therebetween.

13. A vehicle according to claim 12,

wherein one of the first film and the second film comprises a material selected from the group consisting of polyethylene terephthalate, polyether sulfone, polyethylene naphthalate, polycarbonate, nylon, polyether ether ketone, polysulfone, polyetherimide, polyallylate, and polybutylene terephthalate.

14. A vehicle according to claim 11, wherein the display panel is an active matrix type.

15. A vehicle according to claim 11, wherein the vehicle is selected from the group consisting of an automobile, an aircraft, a train, and an electric railcar.