METHODS AND DEVICES FOR DETECTING AND MEASURING ENVIRONMENTAL CONDITIONS IN HIGH PERFORMANCE DEVICE PACKAGES

• US 20110102800A1
• Filed: 11/05/2009
• Published: 05/05/2011
• Est. Priority Date: 11/05/2009
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Bita, Ion
• Granted Patent: US 8,711,361 B2
• Time in Patent Office: Days
• US Class Current: 356/450
• CPC Class Codes: G01N 2021/7773 Reflection
• CPC Class Codes: G01N 2021/7779 interferometric
• CPC Class Codes: G01N 21/77 by observing the effect on a chemical indicator
• CPC Class Codes: G01N 21/78 producing a change of colour
• CPC Class Codes: G01N 21/783 for analysing gases
• CPC Class Codes: G01N 21/81 Indicating humidity
• CPC Class Codes: G01N 33/18 Water

Abstract

An environmental condition sensing device includes an interferometric modulator with optical properties, which change in response to being exposed to a predetermined environmental threshold or condition. The device includes an environmental reactive layer, which alters composition, in an optically-detectable manner, in response to being exposed to a predetermined environmental threshold or condition.

Claims

1. An environmental condition monitoring device comprising:

an environmental reactive layer having a composition, the composition of the environmental reactive layer configured to alter in response to exposure to an environmental condition; and

an interferometric modulator, a reflectivity spectrum of the interferometric modulator being a function of the composition of the environmental reactive layer.

2. The environmental condition monitoring device of claim 1, wherein the interferometric modulator comprises the environmental reactive layer, and wherein the environmental reactive layer defines a boundary for an interferometric cavity in the interferometric modulator.

3. The environmental condition monitoring device of claim 1, wherein a thickness of the environmental reactive layer is less than 10 nm.

4. The environmental condition monitoring device of claim 1, wherein the environmental condition is water.

5. The environmental condition monitoring device of claim 1, wherein the environmental condition is a gas species.

6. The environmental condition monitoring device of claim 1, wherein a rate at which the composition of the environmental reactive layer alters in response to exposure to an environmental condition is altered by the dose of light to which the environmental reactive layer is exposed.

7. The environmental condition monitoring device of claim 1, wherein a rate at which the composition of the environmental reactive layer alters in response to exposure to an environmental condition is altered by the temperature to which the environmental reactive layer is exposed.

8. The environmental condition monitoring device of claim 1, further comprising a dielectric layer.

9. The environmental condition monitoring device of claim 1, wherein the environmental reactive layer is a metal.

10. The environmental condition monitoring device of claim 1, wherein the environmental reactive layer is a semi-conductor.

11. The environmental condition monitoring device of claim 1, wherein the reflectivity of the interferometric modulator at a selected wavelength is a function of the composition of the environmental reactive layer.

12. The environmental condition monitoring device of claim 1, wherein a chromaticity of the interferometric modulator is a function of the composition of the environmental reactive layer.

13. An environmental condition monitoring device comprising:

means for interferometrically modulating light; and

means for altering the reflectivity spectrum of the light modulating means in response to exposure to an environmental condition.

14. The environmental condition monitoring device of claim 13, wherein the means for interferometrically modulating light comprises an interferometric modulator.

15. The environmental condition monitoring device of claim 13, wherein the means for altering the reflectivity of the light modulating means comprises an environmental reactive layer having a composition, the composition configured to alter in response to exposure to an environmental condition.

16. A method of manufacturing an environmental condition monitoring device, the method comprising:

forming an interferometric modulator having an environmental reactive layer, a composition of the environmental reactive layer being configured to alter in response to exposure to the environmental condition, a reflectivity of the interferometric modulator being a function of the composition of the environmental reactive layer.

17. The method of claim 16, further comprising configuring the interferometric modulator or the environmental reactive layer, so the reflectivity of the interferometric modulator at a selected wavelength is a function of the composition of the environmental reactive layer.

18. The method of claim 16, further comprising configuring the interferometric modulator to track changes in chromaticity of the interferometric modulator and the appearance of pinholes in the environmental reactive layer in response to exposure to the environmental condition.

19. A method of detecting exposure to an environmental condition, the method comprising:

providing an interferometric modulator having an environmental reactive layer, a composition of the environmental reactive layer being configured to alter in response to exposure to the environmental condition, a reflectivity of the interferometric modulator being a function of the thickness of the environmental reactive layer.

20. The method of claim 19, further comprising monitoring a change in chromaticity of the interferometric modulator and the appearance of pinholes in the environmental reactive layer in response to exposure to the environmental condition.