Pellicle and a method for making the same

• US 20110104420A1
• Filed: 10/07/2010
• Published: 05/05/2011
• Est. Priority Date: 10/30/2009
• Status: Active Grant

• Current Assignee: Shin-Etsu Chemical Company Limited
• Original Assignee: Shin-Etsu Chemical Company Limited
• Inventors: Horikoshi, Jun
• Granted Patent: US 8,778,569 B2
• Time in Patent Office: Days
• US Class Current: 428/38
• CPC Class Codes: G03F 1/64 characterised by the frames, e.g. structure or material, including bonding means therefor

Abstract

There is provided a pellicle in which the adhesive layer for attaching the pellicle onto a photo mask is made from a room temperature curable two-part adhesive mask so that the formation of the adhesive layer is carried out without heating. The room temperature curable two-part adhesive dispensed on the pellicle frame is not heated for curing.

Claims

1. A pellicle comprising a pellicle membrane, a pellicle frame having a first frame face to which said pellicle membrane is bonded, and a solid adhesive layer which is attached to a second frame face of said pellicle frame, wherein said solid adhesive layer is a two-part room-temperature curing adhesive.

2. The pellicle according to claim 1 wherein said two-part room-temperature curing adhesive contains a silicone resin.

3. The pellicle according to claim 1 wherein said two-part room-temperature curing adhesive contains an acrylic resin.

4. A method for manufacturing a pellicle consisting essentially of a pellicle membrane, a pellicle frame having a first frame face to which said pellicle membrane is bonded, and a solid adhesive layer which is attached to a second frame face of said pellicle frame, wherein said method is characterized in that no heating is applied during the formation of said solid adhesive layer.

5. The method according to claim 4, wherein said solid adhesive layer is made from a two-part room-temperature curing adhesive containing a silicone resin.

6. The method according to claim 4, wherein said solid adhesive layer is made from a two-part room-temperature curing adhesive containing an acrylic resin.