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OMNIDIRECTIONAL ACCELEROMETER DEVICE AND MEDICAL DEVICE INCORPORATING SAME

  • US 20110105955A1
  • Filed: 11/03/2009
  • Published: 05/05/2011
  • Est. Priority Date: 11/03/2009
  • Status: Active Grant
First Claim
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1. An omnidirectional accelerometer device comprising:

  • a piezoelectric sensor element comprising an electrically conductive support substrate, a layer of piezoelectric material overlying the support substrate, and a plurality of electrically conductive sensor electrodes overlying the piezoelectric material, the piezoelectric sensor element further comprising a mass-supporting platform and a plurality of mass-supporting arms, each of the sensor electrodes being located on a corresponding one of the mass-supporting arms; and

    a proof mass coupled to the mass-supporting platform.

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