ACCELERATION SENSOR

  • US 20110138914A1
  • Filed: 11/19/2009
  • Published: 06/16/2011
  • Est. Priority Date: 11/25/2008
  • Status: Active Grant
First Claim
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1. An acceleration sensor comprising:

  • a rectangular moving electrode;

    a pair of beams which connect to centers of two opposite sides of the moving electrode, and support the moving electrode freely swingably; and

    first and second fixed electrodes which are provided on one side and other side of a boundary line, respectively, and are arranged to be opposed to a front surface of the moving electrode at a predetermined interval, wherein a straight line that connects the pair of beams to each other is taken as the boundary line,wherein, on a back surface of the moving electrode, first and second recessed portions are formed on one side of the boundary line and the other side thereof, respectively.

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