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METHOD FOR MODULATING LIGHT WITH MULTIPLE ELECTRODES

  • US 20110170167A1
  • Filed: 01/13/2011
  • Published: 07/14/2011
  • Est. Priority Date: 04/08/1998
  • Status: Abandoned Application
First Claim
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1. A method of making a MEMS device, the method comprising:

  • providing a substrate;

    forming a first layer on the substrate;

    coupling first and second electrodes to the first layer;

    forming a sacrificial layer on the first layer;

    forming a second layer on the sacrificial layer; and

    forming a cavity between the first and second layers by removing the sacrificial layer, wherein the cavity has a variable dimension, and is configured to cause the MEMS device to reflect a wavelength of light, and the first layer is configured to move relative to the second layer.

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