Auto-focusing device and method for maskless exposure apparatus

  • US 20110181856A1
  • Filed: 01/26/2011
  • Published: 07/28/2011
  • Est. Priority Date: 01/26/2010
  • Status: Abandoned Application
First Claim
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1. An auto-focusing device for use in a maskless exposure apparatus, comprising:

  • a projection optical unit including a distance measurement sensor and a focus controller so as to generate a beam;

    a focus calibration unit including a substrate having a reference mark on which the beam generated from the projection optical unit is illuminated, measuring optical unit configured to obtain image information of the beam illuminated on the reference mark, and a stage configured to support the substrate and the measuring optical unit; and

    a controller configured to control the focus controller such that a focus of the beam generated from the projection optical unit is located on a surface of the reference mark and configured to control the distance measurement sensor to acquire a reference distance identical to a distance from the distance measurement sensor to the surface of the reference mark and a distance to the surface of an exposed member,wherein the controller is further configured to control the focus controller such that the focus of the beam generated from the projection optical unit is located on the surface of the exposed member according to a difference between the reference distance and the distance to the surface of the exposed member.

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