REFLECTIVE FILM LAMINATE

• US 20110189474A1
• Filed: 01/04/2011
• Published: 08/04/2011
• Est. Priority Date: 02/01/2010
• Status: Active Grant

• Current Assignee: Klaus Schmidt
• Original Assignee: Klaus Schmidt
• Inventors: Kobayashi, Nobuhiro, Suzuki, Jun, KATSURA, Sho, Sato, Toshiki
• Granted Patent: US 8,603,648 B2
• Time in Patent Office: Days
• US Class Current: 428/336
• CPC Class Codes: C22C 21/00 Alloys based on aluminium
• CPC Class Codes: C23C 14/205 by cathodic sputtering
• CPC Class Codes: C23C 14/5853 Oxidation
• CPC Class Codes: G02B 5/0858 the reflecting layers comprising a single metallic layer with one or more dielectric layers
• CPC Class Codes: Y10T 428/265 1 mil or less

Abstract

A reflective film laminate is provided with high productivity and at low cost in which a protective film with minimized pinholes is provided to improve the alkali resistance and warm water resistance of the reflective film laminate including a pure Al film or an Al-based alloy film so that a reflectivity reduction resulting from the elution or oxidization of the Al film in an alkaline or warm water environment is less likely to occur. The reflective film laminate of the present invention includes, over a substrate, a pure Al film or an Al-based alloy film as a first layer, and an oxide film of a metal containing one or more elements selected from the group consisting of Zr, Cr, Y, Nb, Hf, Ta, W, Ti, Si, and Mo as a second layer over the first layer. The thickness of the second layer is 0.1 to 10 nm.

Claims

1. A reflective film laminate, comprising, over a substrate:

a pure Al film or an Al-based alloy film as a first layer; and

an oxide film of a metal comprising one or more elements selected from the group consisting of Zr, Cr, Y, Nb, Hf, Ta, W, Ti, Si, and Mo as a second layer over the first layer, wherein

a thickness of the second layer is 0.1 to 10 nm.

2. The reflective film laminate according to claim 1, wherein the Al-based alloy film as the first layer contains 0.05 to 2.5 atomic % of a rare earth metal element.

3. The reflective film laminate according to claim 1 or 2, wherein the Al-based alloy film as the first layer contains 0.05 to 3 atomic % of Zr.

4. The reflective film laminate according to any one of claims 1 to 3, wherein the Al-based alloy film as the first layer contains 0.2 to 6.3 atomic % of Mg.

5. The reflective film laminate according to claim 1, wherein the pure Al film as the first layer contains 98.5 atomic % or more of Al, with the remainder being an inevitable impurity.

6. The reflective film laminate according to any one of claims 1 to 5, wherein the second layer is an oxide film of a metal made of one or more selected from the group consisting of Zr, Cr, Nb, Ta, and Ti.

7. A method for producing the reflective film laminate according to any one of claims 1 to 6, comprising the steps of:

forming the first layer over the substrate; and

sputtering a sputtering target made of the metal of the element according to claim 1 to form a sputtered metal thin film over the first layer, and then oxidizing the sputtered metal thin film in an atmosphere containing oxygen to form the second layer.

8. A vehicular lighting fixture, comprising the reflective film laminate according to any one of claims 1 to 6.

9. A lighting device, comprising the reflective film laminate according to any one of claims 1 to 6.

10. An optical mirror, comprising the reflective film laminate according to any one of claims 1 to 6.