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  • US 20110206179A1
  • Filed: 01/19/2011
  • Published: 08/25/2011
  • Est. Priority Date: 01/19/2010
  • Status: Active Grant
First Claim
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1. An inspection system for generating an increased number of scanning views of an object under inspection, comprising:

  • a source for generating a high-energy electron beam;

    an electron beam steering system comprising a plurality of steering devices, for directing said electron beam to a corresponding plurality of production targets, said production targets generating radiation that scans the object;

    a plurality of detector arrays that detect said radiation to produce a corresponding plurality of scanning views; and

    a transport mechanism to move the object through the system.

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