RIGID-BACKED, MEMBRANE-BASED CHIP TOOLING
First Claim
1. A method comprising:
- applying a deformable membrane disposed on a rigid plate to a plurality of chips, wherein the deformable membrane peripherally conforms to each of the plurality of chips irrespective of any difference in height among the plurality of chips, and wherein the deformable membrane prevents each of the plurality of chips from moving in a lateral direction; and
applying a vertical force to the rigid plate to substantially uniformly transfer the vertical force to the chips, wherein said applying a vertical force brings a bonding surface of each chip into contact with a bonding surface of an element to which the plurality of chips will be bonded.
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Accused Products
Abstract
An apparatus for use with multiple individual chips having a rigid plate, and a deformable membrane located on the plate, the deformable membrane having a thickness sufficient to allow the deformable membrane to peripherally conform to each of the individual multiple chips irrespective of any difference in height among the multiple individual chips and to prevent each of the multiple individual chips from moving in a lateral direction, the deformable membrane being configured to uniformly transfer a vertical force, applied to the rigid plate, to the chips so as to bring, under pressure, a bonding surface of each individual chip into contact with a bonding surface of an element to which the individual chips will be bonded during a connect and release cycle without causing damage to the individual chips or bonding surface.
101 Citations
27 Claims
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1. A method comprising:
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applying a deformable membrane disposed on a rigid plate to a plurality of chips, wherein the deformable membrane peripherally conforms to each of the plurality of chips irrespective of any difference in height among the plurality of chips, and wherein the deformable membrane prevents each of the plurality of chips from moving in a lateral direction; and applying a vertical force to the rigid plate to substantially uniformly transfer the vertical force to the chips, wherein said applying a vertical force brings a bonding surface of each chip into contact with a bonding surface of an element to which the plurality of chips will be bonded. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method comprising:
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applying a deformable membrane disposed on a rigid plate to multiple individual chips, wherein the deformable membrane includes a ceramic material, and wherein the deformable membrane conforms to each of the multiple individual chips irrespective of any difference in height among the multiple individual chips; and transferring a vertical force to the chips to bring a bonding surface of each individual chip into contact with a bonding surface of an element to which the multiple individual chips will be bonded. - View Dependent Claims (17, 18, 19, 20)
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21. A method comprising:
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applying a deformable membrane disposed on a rigid plate to a chip, wherein the deformable membrane peripherally conforms to the chip, and wherein the deformable membrane prevents the chip from moving in a lateral direction; and transferring a vertical force to the chip by applying the vertical force to the rigid plate to bring a bonding surface of the chip into contact with a bonding surface of an element to which the chip will be bonded. - View Dependent Claims (22, 23, 24, 25, 26, 27)
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Specification