FORCE SENSOR WITH REDUCED NOISE
First Claim
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1. A microelectromechanical or nanoelectromechanical device for detecting a force following a given direction, comprising:
- a supportat least one seismic mass capable of moving under the effect of the force to be measured in the direction of said force, said mass comprising at least first part and second part able to move relative to each othera detector for detecting the movement of said seismic mass, said seismic mass being articulated relative to the support by at least one pivot link,an actuator capable of making the distance between the axis of the pivot link and the center of gravity of the exertion of the force on said seismic mass vary at high frequency, said actuator being capable of moving the second part of the seismic mass relative to the first part of the seismic mass in a direction different from that of the force to be measured, called excitation axis.
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Abstract
A MEMS or NEMS device for detecting a force following a given direction, comprising a support (4) and at least one seismic mass (2) capable of moving under the effect of the force to be measured in the direction of said force, and means (10) for detecting the movement of said seismic mass (2), said seismic mass being articulated relative to the support by at least one pivot link, and means capable of varying the distance between the axis (Z) of the pivot link and the center of gravity (G) of the exertion of the force on said seismic mass.
42 Citations
19 Claims
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1. A microelectromechanical or nanoelectromechanical device for detecting a force following a given direction, comprising:
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a support at least one seismic mass capable of moving under the effect of the force to be measured in the direction of said force, said mass comprising at least first part and second part able to move relative to each other a detector for detecting the movement of said seismic mass, said seismic mass being articulated relative to the support by at least one pivot link, an actuator capable of making the distance between the axis of the pivot link and the center of gravity of the exertion of the force on said seismic mass vary at high frequency, said actuator being capable of moving the second part of the seismic mass relative to the first part of the seismic mass in a direction different from that of the force to be measured, called excitation axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An accelerometer formed by a microelectromechanical or nanoelec-tromechanical device for detecting an acceleration force following a given direction, comprising:
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a support at least one seismic mass capable of moving under the effect of the acceleration force to be measured in the direction of said acceleration force, said mass comprising at least first part and second part able to move relative to each other a detector for detecting the movement of said seismic mass, said seismic mass being articulated relative to the support by at least one pivot link, an actuator capable of making the distance between the axis of the pivot link and the center of gravity of the exertion of the acceleration force on said seismic mass vary at high frequency, said actuator being capable of moving the second part of the seismic mass relative to the first part of the seismic mass in a direction different from that of the acceleration force, called excitation axis. - View Dependent Claims (18, 19)
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Specification