MECHANICAL LAYER AND METHODS OF FORMING THE SAME
First Claim
1. An electromechanical device, comprising:
- a substrate;
a partially reflective optical stack disposed on the substrate; and
a movable mechanical layer positioned so that the partially reflective optical stack is between the mechanical layer and the substrate, the mechanical layer including a reflective layer, a conductive layer, and a supporting layer that is disposed between the reflective layer and the conductive layer, wherein the supporting layer is anchored on the optical stack in an optically non-active anchor region and extends from the anchor region away from the optical stack spacing the mechanical layer from the optical stack to define a collapsible gap between the mechanical layer and the optical stack,wherein the mechanical layer is movable to an actuated position and a relaxed position by applying a voltage across the mechanical layer and a stationary electrode disposed between the substrate and the collapsible gap, and wherein the collapsible gap is in a collapsed state when the mechanical layer is in the actuated position and the gap is in a non-collapsed state when the mechanical layer is in the relaxed position.
3 Assignments
0 Petitions
Accused Products
Abstract
This disclosure provides mechanical layers and methods of forming the same. In one aspect, an electromechanical systems device includes a substrate and a mechanical layer having an actuated position and a relaxed position. The mechanical layer is spaced from the substrate to define a collapsible gap. The gap is in a collapsed condition when the mechanical layer is in the actuated position and in a non-collapsed condition when the mechanical layer is in the relaxed position. The mechanical layer includes a reflective layer, a conductive layer, and a supporting layer. The supporting layer is positioned between the reflective layer and the conductive layer and is configured to support the mechanical layer.
10 Citations
40 Claims
-
1. An electromechanical device, comprising:
-
a substrate; a partially reflective optical stack disposed on the substrate; and a movable mechanical layer positioned so that the partially reflective optical stack is between the mechanical layer and the substrate, the mechanical layer including a reflective layer, a conductive layer, and a supporting layer that is disposed between the reflective layer and the conductive layer, wherein the supporting layer is anchored on the optical stack in an optically non-active anchor region and extends from the anchor region away from the optical stack spacing the mechanical layer from the optical stack to define a collapsible gap between the mechanical layer and the optical stack, wherein the mechanical layer is movable to an actuated position and a relaxed position by applying a voltage across the mechanical layer and a stationary electrode disposed between the substrate and the collapsible gap, and wherein the collapsible gap is in a collapsed state when the mechanical layer is in the actuated position and the gap is in a non-collapsed state when the mechanical layer is in the relaxed position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
-
-
23. A device, comprising:
-
a substrate; means for partially reflecting light disposed on the substrate; and movable means for reflecting light including a means for supporting the movable reflecting means, the supporting means anchored on the partially reflecting means in an optically non-active anchor region, wherein the supporting means extends from the anchor region away from the partially reflecting means spacing the movable reflecting means from the partially reflecting means to define a collapsible gap between the movable reflecting means and the partially reflecting means, wherein the movable reflecting means is movable to an actuated position and a relaxed position by applying a voltage across the movable reflecting means and a stationary electrode disposed between the substrate and the collapsible gap, and wherein the collapsible gap is in a collapsed state when the movable reflecting means is in the actuated position and the gap is in a non-collapsed state when the movable reflecting means is in the relaxed position. - View Dependent Claims (24, 25, 26, 27)
-
-
28. A method of forming a mechanical layer in an electromechanical device, the method comprising:
-
providing a substrate; forming an optical stack over the substrate; providing a sacrificial layer over the optical stack; removing a portion of the sacrificial layer that is disposed over an anchoring region; forming a mechanical layer over the sacrificial layer and the anchoring region, wherein forming the mechanical layer includes providing a reflective layer over the sacrificial layer, removing a portion of the reflective layer that is disposed over the anchoring region, providing a supporting layer over the reflective layer such that a portion of the supporting layer contacts the anchoring region, and providing a conductive layer over the supporting layer; and removing the sacrificial layer to form a collapsible gap between the mechanical layer and the substrate. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
-
Specification