Micromachined piezoelectric x-axis gyroscope
First Claim
1. A gyroscope, comprising:
- a sense frame;
a proof mass disposed outside the sense frame;
a pair of anchors;
a plurality of drive beams disposed on opposing sides of the sense frame and between the pair of anchors, the drive beams connecting the sense frame to the proof mass, each of the drive beams including a piezoelectric layer and configured to cause drive motions of the proof mass, the drive motions being torsional oscillations substantially in a first plane of the drive beams; and
a plurality of sense beams connecting the sense frame to the pair of anchors, each of the sense beams including a layer of piezoelectric sense electrodes configured to produce a piezoelectric charge in response to an angular rotation applied to the gyroscope,wherein the sense frame is substantially decoupled from the drive motions of the proof mass.
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Accused Products
Abstract
This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a sense frame, a proof mass disposed outside the sense frame, a pair of anchors and a plurality of drive beams. The plurality of drive beams may be disposed on opposing sides of the sense frame and between the pair of anchors. The drive beams may connect the sense frame to the proof mass. The drive beams may be configured to cause torsional oscillations of the proof mass substantially in a first plane of the drive beams. The sense frame may be substantially decoupled from the drive motions of the proof mass. Such devices may be included in a mobile device, such as a mobile display device.
70 Citations
25 Claims
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1. A gyroscope, comprising:
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a sense frame; a proof mass disposed outside the sense frame; a pair of anchors; a plurality of drive beams disposed on opposing sides of the sense frame and between the pair of anchors, the drive beams connecting the sense frame to the proof mass, each of the drive beams including a piezoelectric layer and configured to cause drive motions of the proof mass, the drive motions being torsional oscillations substantially in a first plane of the drive beams; and a plurality of sense beams connecting the sense frame to the pair of anchors, each of the sense beams including a layer of piezoelectric sense electrodes configured to produce a piezoelectric charge in response to an angular rotation applied to the gyroscope, wherein the sense frame is substantially decoupled from the drive motions of the proof mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A gyroscope, comprising:
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sense frame means; proof mass means disposed outside the sense frame means; a pair of anchor means; a plurality of drive beam means disposed on opposing sides of the sense frame means and between the pair of anchor means, the drive beam means connecting the sense frame means to the proof mass means, the drive beam means configured to cause drive motions of the proof mass means, the drive motions being torsional oscillations substantially in a plane of the drive beams; and sense beam means for determining when the gyroscope is operating in a sense mode, wherein the sense frame means is configured to be substantially decoupled from the drive motions of the proof mass means, and wherein the proof mass means and the sense frame means are configured to oscillate together torsionally out of the first plane, in response to an applied angular rotation, when the gyroscope is operating in the sense mode. - View Dependent Claims (19, 20)
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21. A method of fabricating a gyroscope, the method comprising:
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depositing electrodes on a substrate; forming a sense frame; forming a proof mass disposed outside the sense frame; forming a pair of anchors; forming a plurality of drive beams disposed on opposing sides of the sense frame and between the pair of anchors, the drive beams connecting the sense frame to the proof mass, each of the drive beams including a piezoelectric layer and configured to cause drive motions of the proof mass, the drive motions being torsional oscillations substantially in a plane of the drive beams; and forming a plurality of sense beams including a layer of piezoelectric sense electrodes, the sense beams configured for connecting the sense frame to the pair of anchors, wherein the sense frame is substantially decoupled from the drive motions of the proof mass, wherein forming the plurality of drive beams includes the following; depositing a first metal layer that is in contact with the electrodes; depositing a piezoelectric layer on the first metal layer; depositing a second metal layer on the piezoelectric layer; and electroplating a third metal layer on the second metal layer. - View Dependent Claims (22, 23, 24, 25)
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Specification