Pixel-level optical elements for uncooled infrared detector devices
First Claim
1. An uncooled infrared detector element, comprising:
- a substrate;
a microbolometer pixel membrane structure configured to absorb infrared radiation, the microbolometer pixel membrane structure comprising a membrane material supported at a position spaced above the substrate; and
a monolithically fabricated optical element suspended over and above the membrane material of the microbolometer pixel membrane structure.
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Accused Products
Abstract
Pixel-level monolithic optical element configurations for uncooled infrared detectors and focal plane arrays in which a monolithically integrated or fabricated optical element may be suspended over a microbolometer pixel membrane structure of an uncooled infrared detector element A monolithic optical element may be, for example, a polarizing or spectral filter element, an optically active filter element, or a microlens element that is structurally attached by an insulating interconnect to the existing metal interconnects such that the installation of the optical element substantially does not impact the thermal mass or thermal time constant of the microbolometer pixel structure, and such that it requires little if any additional device real estate area beyond the area originally consumed by the microbolometer pixel structure interconnects.
37 Citations
34 Claims
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1. An uncooled infrared detector element, comprising:
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a substrate; a microbolometer pixel membrane structure configured to absorb infrared radiation, the microbolometer pixel membrane structure comprising a membrane material supported at a position spaced above the substrate; and a monolithically fabricated optical element suspended over and above the membrane material of the microbolometer pixel membrane structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A focal plane array assembly, comprising:
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a plurality of uncooled infrared detector elements arranged as an array, each of the plurality of uncooled infrared detector elements comprising; a substrate including read out integrated circuitry (ROIC), and a microbolometer pixel membrane structure configured to absorb infrared radiation, the microbolometer pixel membrane structure comprising an electrically conductive membrane material supported at a position spaced above the substrate by at least two spaced electrically conductive interconnects electrically coupled to the ROIC; where at least a portion of the plurality of uncooled infrared detector elements of the array further comprise a monolithically fabricated optical element suspended over and above the membrane material of the microbolometer pixel membrane structure by at least two optical element support interconnects that are at least partially aligned to and supported by the at least two electrically conductive interconnects. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A method of making a focal plane array assembly, comprising:
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providing a substrate; forming read out integrated circuitry (ROIC) for the substrate; forming a plurality of uncooled infrared detector elements arranged as an array, each of the plurality of uncooled infrared detector elements comprising; a substrate including read out integrated circuitry (ROIC); and a microbolometer pixel membrane structure configured to absorb infrared radiation, the microbolometer pixel membrane structure comprising an electrically conductive membrane material supported at a position spaced above the substrate by at least two spaced electrically conductive interconnects electrically coupled to the ROIC, the microbolometer pixel membrane structure having a thermal mass value; and monolithically fabricating an optical element suspended over and above the membrane material of the microbolometer pixel membrane structure of at least a portion of the plurality of uncooled infrared detector elements of the array by at least two optical element support interconnects that are at least partially aligned to and supported by the at least two electrically conductive interconnects. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification