A METHOD OF FABRICATING STRUCTURED PARTICLES COMPOSED OF SILICON OR A SILICON-BASED MATERIAL AND THEIR USE IN LITHIUM RECHARGEABLE BATTERIES
First Claim
1. A process of etching silicon to form silicon pillars on the etched surfaces, the process comprising:
- treating silicon with an etching solution comprising;
5 to 10M HF0.01 to 0.1M Ag+ ions0.02 to 0.2M NO3−
ions andadding further NO3−
ions in the form of an alkali metal, nitric acid, or ammonium nitrate salt, to maintain the concentration of nitrate ions within the above range; and
separating the etched silicon from the solution.
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Abstract
A process for etching silicon to form silicon pillars on the etched surfaces, includes treating silicon with an etching solution that includes 5 to 10M HF 0.01 to 0.1M Ag+ ions and 0.02 to 0.2M NO3− ions. Further, NO3− ions in the form of alkali metal, nitric acid or ammonium nitrate salt is added to maintain the concentration of nitrate ions within the above range. The etched silicon is separated from the solution. The process provides pillars, especially for use as the active anode material in lithium ion batteries. The process is advantageous because it uses an etching bath containing only a small number of ingredients whose concentration needs to be controlled and it can be less expensive to operate than previous processes.
27 Citations
37 Claims
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1. A process of etching silicon to form silicon pillars on the etched surfaces, the process comprising:
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treating silicon with an etching solution comprising; 5 to 10M HF 0.01 to 0.1M Ag+ ions 0.02 to 0.2M NO3−
ions andadding further NO3−
ions in the form of an alkali metal, nitric acid, or ammonium nitrate salt, to maintain the concentration of nitrate ions within the above range; andseparating the etched silicon from the solution. - View Dependent Claims (2, 3, 4, 5, 6, 14, 17, 20, 23, 31, 32, 33, 34, 35, 36, 37)
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7-13. -13. (canceled)
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15-16. -16. (canceled)
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18-19. -19. (canceled)
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21-22. -22. (canceled)
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24-30. -30. (canceled)
Specification