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A METHOD OF FABRICATING STRUCTURED PARTICLES COMPOSED OF SILICON OR A SILICON-BASED MATERIAL AND THEIR USE IN LITHIUM RECHARGEABLE BATTERIES

  • US 20110269019A1
  • Filed: 10/02/2009
  • Published: 11/03/2011
  • Est. Priority Date: 10/10/2008
  • Status: Active Grant
First Claim
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1. A process of etching silicon to form silicon pillars on the etched surfaces, the process comprising:

  • treating silicon with an etching solution comprising;

    5 to 10M HF0.01 to 0.1M Ag+ ions0.02 to 0.2M NO3

    ions andadding further NO3

    ions in the form of an alkali metal, nitric acid, or ammonium nitrate salt, to maintain the concentration of nitrate ions within the above range; and

    separating the etched silicon from the solution.

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