THREE-TERMINAL METAL-OXIDE-METAL CAPACITOR

• US 20110278699A1
• Filed: 08/01/2011
• Published: 11/17/2011
• Est. Priority Date: 06/03/2009
• Status: Active Grant

• Current Assignee: MediaTek, Inc.
• Original Assignee: MediaTek, Inc.
• Inventors: Lin, Tser-Yu
• Granted Patent: US 8,503,159 B2
• Time in Patent Office: Days
• US Class Current: 257/532
• CPC Class Codes: H01L 23/5223 Capacitor integral with wiring layers
• CPC Class Codes: H01L 28/86 having horizontal extensions
• CPC Class Codes: H01L 28/90 having vertical extensions
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A capacitor includes a first metal plate; a second metal plate in close proximity to the first metal plate; a third metal plate in close proximity to the first metal plate, and at least one dielectric layer interposed between the first, second and three vertical metal plates. The first, second and third metal plate are connected to three different terminals of an integrated circuit.

Claims

1. A capacitor, comprising:

a first vertical metal plate connected to a first terminal;

a second vertical metal plate in close proximity to the first vertical metal plate, the second vertical metal plate being connected to a second terminal;

a third vertical metal plate in close proximity to the first vertical metal plate, wherein the third vertical metal plate is disposed on one side of the first vertical metal plate opposite to the second vertical metal plate, and wherein the third vertical metal plate is connected to a third terminal; and

at least one dielectric layer interposed between the first, second and third vertical metal plates.

2. The capacitor according to claim 1 wherein the first terminal, the second terminal and the third terminal are three different terminals of an integrated circuit.

3. The capacitor according to claim 1 wherein a space between the first and second vertical metal plates or between the first and third vertical metal plates is substantially of a minimum design rule.

4. The capacitor according to claim 1 wherein each of the first, second and third vertical metal plates is comprised of stacked metal strips.

5. The capacitor according to claim 4 wherein the stacked metal strips are connected by vias.

6. The capacitor according to claim 1 wherein the second vertical metal plate is substantially placed in juxtaposition to the third vertical metal plate.

7. The capacitor according to claim 1 wherein the second vertical metal plate is substantially placed in a catercorner malposition with respect to the third vertical metal plate.

8. The capacitor according to claim 1 wherein the second vertical metal plate is substantially placed in juxtaposition to a fourth vertical metal plate connected to the second terminal, wherein the fourth vertical metal plate is substantially aligned with the third vertical metal plate on the same side of the first vertical metal plate.

9. A capacitor, comprising:

a first vertical metal plate;

a second vertical metal plate in parallel with the first vertical metal plate, wherein the first and second vertical metal plates are both connected to a first terminal;

a first segmental metal plate between the first and second vertical metal plates, the first segmental metal plate being connected to a second terminal; and

a second segmental metal plate substantially aligned with the first segmental metal plate between the first and second vertical metal plates, wherein the second segmental metal plate is connected to a third terminal.

10. The capacitor according to claim 9 wherein the first segmental metal plate is electrically isolated from the second segmental metal plate by at least one dielectric layer.

11. The capacitor according to claim 9 wherein the first terminal, the second terminal and the third terminal are three different terminals of an integrated circuit.

12. The capacitor according to claim 9 further comprising a third vertical metal plate in close proximity to the first vertical metal plate and in parallel with the first vertical metal plate, wherein the third vertical metal plate is connected to a fourth terminal.