OPTICAL IMAGE MEASURING DEVICE
First Claim
1. An optical image measuring device comprising:
- an optical system that splits a low-coherence light beam into signal light and reference light, generates interference light by causing said signal light propagated through a measured object and said reference light propagated through a reference object to interfere, and generates detection signals by detecting said interference light; and
an image forming part that forms a tomographic image of said measured object based on said detection signals;
said optical image measuring device comprising;
an alignment part that performs alignment of said optical system with respect to the measured object;
a focusing part that focuses said optical system with respect to the region of interest of said measured object;
a determining part that determines the suitability of the position of said optical system by said alignment part, the suitability of the focus state by said focusing part, and the suitability of the position of the tomographic image of said region of interest in a frame that is formed by said image forming part; and
a control part that, when it is determined that all of the position of said optical system, the position of said focus state and the position in said frame are appropriate, controls said optical system and said image forming part, making it possible to obtain the tomographic image of said region of interest.
1 Assignment
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Accused Products
Abstract
An optical image measuring device includes: an optical system that generates and detects interference light; an image forming part that forms a tomographic image based on the detection; an alignment part that performs alignment of the optical system with respect to an object; a focusing part that focuses the optical system with respect to the region of interest; a determining part that determines the suitability of the position of the optical system by the alignment part, the suitability of the focus state by the focusing part, and the suitability of the position of the tomographic image in a frame; a control part that, when it is determined that all of the positions of the optical system, position of focus state and the position in said frame are appropriate, controls the optical system and the image forming part, making it possible to obtain the tomographic image of the region of interest.
29 Citations
14 Claims
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1. An optical image measuring device comprising:
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an optical system that splits a low-coherence light beam into signal light and reference light, generates interference light by causing said signal light propagated through a measured object and said reference light propagated through a reference object to interfere, and generates detection signals by detecting said interference light; and an image forming part that forms a tomographic image of said measured object based on said detection signals; said optical image measuring device comprising; an alignment part that performs alignment of said optical system with respect to the measured object; a focusing part that focuses said optical system with respect to the region of interest of said measured object; a determining part that determines the suitability of the position of said optical system by said alignment part, the suitability of the focus state by said focusing part, and the suitability of the position of the tomographic image of said region of interest in a frame that is formed by said image forming part; and a control part that, when it is determined that all of the position of said optical system, the position of said focus state and the position in said frame are appropriate, controls said optical system and said image forming part, making it possible to obtain the tomographic image of said region of interest. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 14)
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12. An optical image measuring device comprising:
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an optical system that splits a low-coherence light beam into signal light and reference light, generates interference light by causing said signal light propagated through a measured object and said reference light propagated through a reference object to interfere, and generates detection signals by detecting said interference light; and an image forming part that forms a tomographic image of said measured object based on said detection signals; said optical image measuring device comprising; an alignment part that performs alignment of said optical system with respect to the measured object; a focusing part that focuses said optical system with respect to the region of interest of said measured object; a tracking part that, based on the tomographic image that is formed by said image forming part, causes the irradiation position of said signal light with respect to said measured object to track movement of said measured object such that the tomographic image of said region of interest is disposed in substantially the middle inside of said frame, a determining part that determines the suitability of the position of said optical system by said alignment part, determines the suitability of the focus state by said focusing part, determines the suitability of the position of the tomographic image of said region of interest that is formed by said image forming part in a frame, determines the suitability of the image quality of said tomographic image by analyzing the tomographic image that is formed by said image forming part, and determines the suitability of the tracking state of the irradiation position of said signal light; and a control part that, when it is determined that all of the position of said optical system, the position of said focus state, the position inside said frame, the image quality of said tomographic image, and said tracking state are appropriate, controls said optical system and said image forming part, making it possible to obtain the tomographic image of said region of interest.
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13. An optical image measuring device comprising:
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an optical system that splits a low-coherence light beam into signal light and reference light, generates interference light by causing said signal light propagated through a measured object and said reference light propagated through a reference object to interfere, and generates detection signals by detecting said interference light; an image forming part that forms part for forming a tomographic image of said measured object, based on said detection signals; and an imaging part that images a 2-dimensional image of said measured object on the surface that is substantially perpendicular to the traveling direction of said signal light, with respect to said measured object; and said optical image measuring device comprising; an alignment part that performs alignment of said optical system with respect to the measured object; a focusing part that focuses said optical system with respect to the region of interest of said measured object; a tracking part that, based on said 2-dimensional image that is imaged, causes the irradiation position of said signal light with respect to said measured object to track movement of said measured object such that the tomographic image of said region of interest is disposed in substantially the middle inside of said frame; a determining part that determines the suitability of the position of said optical system by said alignment part, determines the suitability of the focus state by said focusing part, determines the suitability of the position of the tomographic image of said region of interest that is formed by said image forming part in a frame, determines the suitability of the image quality of said tomographic image by analyzing the tomographic image that is formed by said image forming part, and determines the suitability of the tracking state of the irradiation position of said signal light; and a control part that, when it is determined that all of the position of said optical system, the position of said focus state, the position inside said frame, the image quality of said tomographic image, and said tracking state are appropriate, controls said optical system and said image forming part, making it possible to obtain the tomographic image of said region of interest.
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Specification