PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS

  • US 20110291644A1
  • Filed: 05/26/2011
  • Published: 12/01/2011
  • Est. Priority Date: 05/28/2010
  • Status: Active Grant
First Claim
Patent Images

1. A physical quantity sensor comprising:

  • a base; and

    a first rocking body and a second rocking body disposed over the base via a gap,wherein the first rocking body includes a first supporting portion, a second supporting portion, and a first movable electrode, is supported over the base by the first supporting portion and the second supporting portion which are disposed on a first axis, and is partitioned into a first region and a second region by the first axis when viewed in plan, where each of the first and second regions is provided with the first movable electrode,the second rocking body includes a third supporting portion, a fourth supporting portion, and a second movable electrode, is supported over the base by the third supporting portion and the fourth supporting portion which are disposed on a second axis, and is partitioned into a third region and a fourth region by the second axis when viewed in plan, where each of the third and fourth regions is provided with the second movable electrode,fixed electrodes facing the first movable electrode and the second movable electrode are formed on the base,the mass of the second region is larger than the mass of the first region, and the mass of the third region is larger than the mass of the fourth region, anda direction arranged from the first region to the second region of the first rocking body is equate to a direction arranged from the third region to the fourth region of the second rocking body.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×