• US 20120013224A1
  • Filed: 09/27/2011
  • Published: 01/19/2012
  • Est. Priority Date: 01/26/2009
  • Status: Active Grant
First Claim
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1. A resonator comprising:

  • a substrate;

    a piezoelectric layer formed over said substrate a least a portion of the piezoelectric layer being disposed between two electrodes;

    a temperature compensating layer surrounding the piezoelectric layer and electrodes;

    wherein the piezoelectric material is supported on the substrate by an electrically conductive material structure that electrically interconnects one of contact pads or semiconductor devices on the substrate with the top electrode;

    a cap layer formed over, but not in contact with, the piezoelectric material surrounded by the temperature compensating layer.

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