SEMICONDUCTOR DEVICE

• US 20120032172A1
• Filed: 07/29/2011
• Published: 02/09/2012
• Est. Priority Date: 08/06/2010
• Status: Abandoned Application

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: NODA, Kosei, ENDO, Yuta, SASAKI, Toshinari
• Application Number:
  US13/193,755
• Publication Number:
  US 20120032172A1
• Time in Patent Office: Days
• US Class Current: 257/57
• CPC Class Codes: H01L 29/41733 for thin film transistors with insulated gate
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

A semiconductor device including the following components and a manufacturing method of the semiconductor device are provided. The semiconductor device includes a substrate; an oxide semiconductor layer over the substrate; a source electrode and a drain electrode whose end portion has a taper angle and whose upper end portion has a curved surface, the source electrode and the drain electrode being electrically connected to the oxide semiconductor layer; a gate insulating layer being in contact with a part of the oxide semiconductor layer and covering the oxide semiconductor layer, the source electrode, and the drain electrode; and a gate electrode overlapping with the oxide semiconductor layer and being over the gate insulating layer.

Claims

1. A semiconductor device comprising:

an insulating layer over a substrate;

an oxide semiconductor layer over the substrate;

a source electrode and a drain electrode whose end portion has a taper angle and whose upper end portion has a curved surface, the source electrode and the drain electrode being electrically connected to the oxide semiconductor layer;

a gate insulating layer being in contact with a part of the oxide semiconductor layer and covering the oxide semiconductor layer, the source electrode, and the drain electrode; and

a gate electrode overlapping with the oxide semiconductor layer and being over the gate insulating layer.

2. The semiconductor device according to claim 1, wherein the source electrode and the drain electrode are formed between the gate insulating layer and the oxide semiconductor layer.

3. The semiconductor device according to claim 1, wherein the source electrode and the drain electrode are formed between the substrate and the oxide semiconductor layer.

4. The semiconductor device according to claim 1, wherein the oxide semiconductor layer is formed over and in contact with the insulating layer.

5. The semiconductor device according to claim 1, wherein the source electrode and the drain electrode are formed over and in contact with the insulating layer.

6. The semiconductor device according to claim 1, wherein the amount of oxygen released from the insulating layer is greater than or equal to 1.0×

10¹⁸ atoms/cm³.

7. The semiconductor device according to claim 1, wherein the insulating layer comprises silicon oxide in which the number of oxygen atoms per unit volume is more than twice the number of silicon atoms per unit volume.

8. The semiconductor device according to claim 1, wherein the taper angle is greater than or equal to 20°

and less than 90°

.

9. The semiconductor device according to claim 1, wherein a curvature radius of the upper end portion is greater than or equal to 1/100 and less than or equal to ½

of a thickness of the source electrode and the drain electrode.

10. The semiconductor device according to claim 1, wherein the oxide semiconductor layer comprises at least one of In, Ga, and Zn.

11. The semiconductor device according to claim 1, wherein the gate electrode overlaps with the end portion and the upper end portion.

12. A semiconductor device comprising:

an insulating layer over a substrate;

an oxide semiconductor layer over the substrate;

a source electrode and a drain electrode whose end portion has a taper angle and whose upper end portion has a curved surface, the source electrode and the drain electrode being electrically connected to the oxide semiconductor layer;

a gate insulating layer being in contact with a part of the oxide semiconductor layer and covering the oxide semiconductor layer, the source electrode, and the drain electrode; and

a gate electrode overlapping with the oxide semiconductor layer and being over the gate insulating layer,

wherein an average surface roughness Ra of the source electrode is less than or equal to 0.5 nm.

13. The semiconductor device according to claim 12, wherein the source electrode and the drain electrode are formed between the gate insulating layer and the oxide semiconductor layer.

14. The semiconductor device according to claim 12, wherein the source electrode and the drain electrode are formed between the substrate and the oxide semiconductor layer.

15. The semiconductor device according to claim 12, wherein the oxide semiconductor layer is formed over and in contact with the insulating layer.

16. The semiconductor device according to claim 12, wherein the source electrode and the drain electrode are formed over and in contact with the insulating layer.

17. The semiconductor device according to claim 12, wherein the amount of oxygen released from the insulating layer is greater than or equal to 1.0×

10¹⁸ atoms/cm³.

18. The semiconductor device according to claim 12, wherein the insulating layer comprises silicon oxide in which the number of oxygen atoms per unit volume is more than twice the number of silicon atoms per unit volume.

19. The semiconductor device according to claim 12, wherein the taper angle is greater than or equal to 20°

and less than 90°

.

20. The semiconductor device according to claim 12, wherein a curvature radius of the upper end portion is greater than or equal to 1/100 and less than or equal to ½

of a thickness of the source electrode and the drain electrode.

21. The semiconductor device according to claim 12, wherein the oxide semiconductor layer comprises at least one of In, Ga, and Zn.

22. The semiconductor device according to claim 12, wherein the gate electrode overlaps with the end portion and the upper end portion.

23. A semiconductor device comprising:

an insulating layer over a substrate;

an oxide semiconductor layer over the substrate;

a source electrode and a drain electrode whose end portion has a taper angle and whose upper end portion has a curved surface, the source electrode and the drain electrode being electrically connected to the oxide semiconductor layer;

a gate insulating layer being in contact with a part of the oxide semiconductor layer and covering the oxide semiconductor layer, the source electrode, and the drain electrode; and

a gate electrode overlapping with the oxide semiconductor layer and being over the gate insulating layer,

wherein an average surface roughness Ra of the oxide semiconductor layer is less than or equal to 0.5 nm.

24. The semiconductor device according to claim 23, wherein the source electrode and the drain electrode are formed between the gate insulating layer and the oxide semiconductor layer.

25. The semiconductor device according to claim 23, wherein the source electrode and the drain electrode are formed between the substrate and the oxide semiconductor layer.

26. The semiconductor device according to claim 23, wherein the oxide semiconductor layer is formed over and in contact with the insulating layer.

27. The semiconductor device according to claim 23, wherein the source electrode and the drain electrode are formed over and in contact with the insulating layer.

28. The semiconductor device according to claim 23, wherein the amount of oxygen released from the insulating layer is greater than or equal to 1.0×

10¹⁸ atoms/cm³.

29. The semiconductor device according to claim 23, wherein the insulating layer comprises silicon oxide in which the number of oxygen atoms per unit volume is more than twice the number of silicon atoms per unit volume.

30. The semiconductor device according to claim 23, wherein the taper angle is greater than or equal to 20°

and less than 90°

.

31. The semiconductor device according to claim 23, wherein a curvature radius of the upper end portion is greater than or equal to 1/100 and less than or equal to ½

of a thickness of the source electrode and the drain electrode.

32. The semiconductor device according to claim 23, wherein the oxide semiconductor layer comprises at least one of In, Ga, and Zn.

33. The semiconductor device according to claim 23, wherein the gate electrode overlaps with the end portion and the upper end portion.