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System, method, and product for imaging probe arrays with small feature sizes

  • US 20120051663A1
  • Filed: 09/23/2011
  • Published: 03/01/2012
  • Est. Priority Date: 01/27/2006
  • Status: Active Grant
First Claim
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1. A method for resolving features on a probe array, comprising:

  • acquiring a plurality of micro-shifted images of a region of a probe array using an image acquisition device comprising an objective lens and a sensing element having pixels;

    shifting the images by less than one half a size of the pixel of a sensing element while maintaining a fixed spatial relationship between the probe array and an objective lens of the image acquisition device;

    reconstructing an image of the probe array using the micro-shifted images; and

    deriving intensity values for one or more probe features disposed on the probe array from the reconstructed image.

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