GATE VALVE AND SUBSTRATE PROCESSING APPARATUS EQUIPPED WITH THE SAME
First Claim
1. A gate valve apparatus comprising:
- a valve casing that includes a first valve seat and a second valve seat, and in which an opening portion is formed;
a closure element that is capable of closing the opening portiona sealing member that is provided in the closure element, and contacts the first valve seat thereby to seal the opening portion when the closure element closes the opening portion; and
a shutoff member that is made of a thin metal plate and attached in the closure element, and contacts the second valve seat thereby to shut off a space between the opening portion and the sealing member when the closure element closes the opening portion.
1 Assignment
0 Petitions
Accused Products
Abstract
Agate valve apparatus is disclosed. The gate valve apparatus is provided with a valve casing that includes a first valve seat and a second valve seat, and in which an opening portion is formed; and a closure element that includes a sealing member that contacts the first valve seat to seal the opening portion. In addition, the gate valve apparatus is provided with a shutoff member that contacts the second valve seat to thereby be deformed, so that a space between the opening portion and a sealing member is shut off by the shutoff member when the closure element closes the opening portion. The shutoff member is deformed and continues to contact the second valve seat under normal and high temperature environments when the closure element closes the opening portion.
17 Citations
6 Claims
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1. A gate valve apparatus comprising:
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a valve casing that includes a first valve seat and a second valve seat, and in which an opening portion is formed; a closure element that is capable of closing the opening portion a sealing member that is provided in the closure element, and contacts the first valve seat thereby to seal the opening portion when the closure element closes the opening portion; and a shutoff member that is made of a thin metal plate and attached in the closure element, and contacts the second valve seat thereby to shut off a space between the opening portion and the sealing member when the closure element closes the opening portion. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification