ARRAY OF BAW RESONATORS WITH MASK CONTROLLED RESONANT FREQUENCIES

  • US 20120079692A1
  • Filed: 12/15/2011
  • Published: 04/05/2012
  • Est. Priority Date: 03/11/2009
  • Status: Active Grant
First Claim
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1. A method for forming a resonator comprising:

  • forming a first conductive layer on a substrate;

    forming a layer for converting one of electrical energy or mechanical energy to the other on the first conductive layer;

    forming over said layer for converting one of electrical energy or mechanical energy to the other a mass load layer for adjusting the acoustic path length of the resonator to achieve a desired predetermined resonant frequency;

    patterning the mass load layer by one of adding material thereto or removing portions therefrom to form apertures therein that extend at least one of either partially into or entirely through the mass load layer; and

    forming a second conductive layer on the mass load layer, wherein at least a portion of the apertures that extend entirely through the mass load layer are filled by the second conductive layer material.

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