CAPACITIVE ELECTROMECHANICAL TRANSDUCER APPARATUS AND METHOD FOR ADJUSTING ITS SENSITIVITY
First Claim
1. A capacitive electromechanical transducer apparatus comprising:
- cells configured to include a first electrode and second electrodes, each of which is disposed so as to be opposite the first electrode with a cavity therebetween,wherein at least one of the cells includes a processed unit on which at least either addition of a material or removal of a material has been performed as processing.
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Accused Products
Abstract
A technology that makes it possible to adjust, through processing, an output signal sent from a capacitive electromechanical transducer apparatus such as a CMUT upon reception of an elastic wave is provided.
A capacitive electromechanical transducer apparatus 100 includes cells 102 that include a first electrode 104 and second electrodes 106, each of which is disposed so as to be opposite the first electrode 104 with a cavity 105 therebetween. In the capacitive electromechanical transducer apparatus 100, at least one of the cells 102 includes a processed unit on which at least either addition of a material or removal of a material is performed as processing.
18 Citations
6 Claims
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1. A capacitive electromechanical transducer apparatus comprising:
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cells configured to include a first electrode and second electrodes, each of which is disposed so as to be opposite the first electrode with a cavity therebetween, wherein at least one of the cells includes a processed unit on which at least either addition of a material or removal of a material has been performed as processing. - View Dependent Claims (2, 3, 4)
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5. A method for adjusting a sensitivity of a capacitive electromechanical transducer apparatus that includes cells configured to include a first electrode and second electrodes, each of which is disposed so as to be opposite the first electrode with a cavity therebetween, the method comprising:
performing, as processing, at least either addition of a material or removal of a material onto or from at least one of the cells to adjust an output signal sent from the at least one of the cells upon reception of an elastic wave. - View Dependent Claims (6)
Specification