HALL SENSOR ELEMENT AND METHOD FOR MEASURING A MAGNETIC FIELD
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Abstract
The invention provides a Hall sensor element having a substrate, which has a main surface, having an electrically conductive active region, which extends from the main surface into the substrate, and having a first electrically conductive, buried layer in the substrate, which contacts the active region at a first lower contact surface. From another standpoint, the invention provides a method for measuring a magnetic field with the aid of such a Hall sensor element, in which an electrical measuring current is conducted through the active region between a first upper contact electrode at the main surface and the first lower contact surface. A Hall voltage is picked up in the active region along a path running inclined with respect to a connecting line between the first lower contact surface and the first upper contact electrode. Alternatively, a measuring current is conducted through the active region over such a path, and a Hall voltage is picked up between the first upper contact electrode and the first lower contact surface.
25 Citations
21 Claims
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1-11. -11. (canceled)
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12. A Hall sensor element, comprising:
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a substrate having a main surface; an electrically conductive active region extending from the main surface into the substrate; and an electrically conductive first buried layer in the substrate, which contacts the active region at a first lower contact surface; and a first upper contact electrode, which contacts the active region at the main surface; wherein the first upper contact electrode is situated diagonally offset to the first lower contact surface so that a first operating current flows between the lower contact surface and the first upper contact electrode diagonally inclined with respect to the main surface, along a first connecting line inclined by 45°
with respect to the main surface. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A Hall sensor element, for multidimensional or three-dimensional measurement of a magnetic field, comprising:
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a substrate having a main surface; an electrically conductive active region extending from the main surface into the substrate; and an electrically conductive first buried layer in the substrate, which contacts the active region at a first lower contact surface; and a first upper contact electrode, which contacts the active region at the main surface; wherein the first upper contact electrode is situated diagonally offset to the first lower contact surface so that a first operating current flows between the lower contact surface and the first upper contact electrode diagonally inclined with respect to the main surface, along a first connecting line inclined by 45°
with respect to the main surface.
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20. A method for measuring a magnetic field with the aid of a Hall sensor element, the method comprising:
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conducting an electrical measuring current between a first upper contact electrode and a first lower contact surface, which is diagonally offset to the first upper contact electrode along a first connecting line through the active region which is inclined by 45°
in particular with respect to the main surface; andpicking up a Hall voltage in the active region along a path, which runs inclined to a connecting line between the first lower contact surface and the first upper contact electrode; wherein the Hall sensor element includes; a substrate having the main surface; an electrically conductive active region extending from the main surface into the substrate; and an electrically conductive first buried layer in the substrate, which contacts the active region at the first lower contact surface; and the first upper contact electrode, which contacts the active region at the main surface.
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21. The method for measuring a magnetic field with the aid of a Hall sensor element, the method comprising:
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conducting an electrical measuring current through the active region over a path which runs inclined to a first connecting line between the first lower contact surface and the first upper contact electrode along a second connecting line, which is inclined in particular by 45°
with respect to the main surface; andpicking up a Hall voltage between the first upper contact electrode and the first lower contact surface; wherein the Hall sensor element includes; a substrate having the main surface; an electrically conductive active region extending from the main surface into the substrate; and an electrically conductive first buried layer in the substrate, which contacts the active region at the first lower contact surface; and the first upper contact electrode, which contacts the active region at the main surface.
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Specification