MEMS Particle sorting actuator and method of manufacturing
First Claim
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1. A microfabricated particle sorting actuator capable of motion and fabricated on a substrate, comprising:
- a plurality of microfabricated fluidic channels formed in a plane of the substrate; and
a movable structure with a motion substantially in the plane, acted on by a force substantially in the same plane and wherein the movable structure simultaneously opens a first microfabricated fluidic channel which is in the plane and closes a second microfabricated fluidic channel also in the plane.
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Abstract
A MEMS-based system and a method are described for separating a target particle from the remainder of a fluid stream. The system makes use of a unique, microfabricated movable structure formed on a substrate, which moves in a rotary fashion about one or more fixed points, which are all located on one side of the axis of motion. The movable structure is actuated by a separate force-generating apparatus, which is entirely separate from the movable structure formed on its substrate. This allows the movable structure to be entirely submerged in the sample fluid.
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20 Claims
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1. A microfabricated particle sorting actuator capable of motion and fabricated on a substrate, comprising:
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a plurality of microfabricated fluidic channels formed in a plane of the substrate; and a movable structure with a motion substantially in the plane, acted on by a force substantially in the same plane and wherein the movable structure simultaneously opens a first microfabricated fluidic channel which is in the plane and closes a second microfabricated fluidic channel also in the plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification