IMAGING DEVICE AND METHOD FOR HIGH-SENSITIVITY OPTICAL SCANNING AND INTEGRATED CIRCUIT THEREFOR

• US 20120206634A1
• Filed: 01/17/2012
• Published: 08/16/2012
• Est. Priority Date: 06/22/2001
• Status: Active Grant

• Current Assignee: Orbotech Limited (KLA Corporation)
• Original Assignee: Orbotech Limited (KLA Corporation)
• Inventors: KATZIR, Yigal, GUR-ARIE, Itay, MALINOVICH, Yacov
• Granted Patent: US 8,536,506 B2
• Time in Patent Office: Days
• US Class Current: 348/295
• CPC Class Codes: G01N 21/8851 Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002
• CPC Class Codes: G01N 21/8901 Optical details; Scanning details per se G02B
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: H01L 27/14645 Colour imagers
• CPC Class Codes: H04N 25/46 by combining or binning pixels
• CPC Class Codes: H04N 25/768 for time delay and integration [TDI]
• CPC Class Codes: H04N 25/772 comprising A/D, V/T, V/F, I/T or I/F converters
• CPC Class Codes: H04N 3/155 Control of the image-sensor operation, e.g. image processing within the image-sensor

Abstract

An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.

Claims

1. An imaging device, comprising:

a two-dimensional array of sensor elements which generates image data corresponding to a plurality of successive overlapping image frames of an object;

at least one A/D converter which converts the image data into digital image data corresponding to the plurality of successive overlapping image frames;

a plurality of digital registers which temporarily store the digital image data;

a digital memory which stores image data;

a plurality of digital adders which add values of the digital image data held in the digital registers and corresponding to each of the plurality of successive overlapping image frames to image data stored in the digital memory, thus forming a single composite image frame of the object obtained from the successive overlapping image frames.

2. An imaging device, comprising

a two-dimensional array of sensor elements which generates image data corresponding to a plurality of successive overlapping image frames;

an A/D converter which converts the image data into digital image data corresponding to the plurality of successive overlapping image frames;

a plurality of digital registers which store the digital image data received from the A/D converter;

a plurality of digital adders which add values of the digital image data stored in the digital registers to image data stored in a digital memory, thus forming a single composite image frame obtained from the successive overlapping image frames, and storing the composite image frame in the digital memory,

wherein each successive image frame is offset from an immediately preceding image frame by a spacing of not greater than a single pixel, such that each addition, by the digital adders of image data stored in the digital registers to image data stored in the digital memory adds a new single pixel line of data to the composite image frame.

3. An imaging device, comprising

a two-dimensional array of sensor elements which generates image data corresponding to a plurality of successive overlapping image frames;

an A/D converter which converts the image data into digital image data corresponding to the plurality of successive overlapping image frames;

a plurality of digital registers which store the digital image data received from the A/D converter;

a plurality of digital adders which add values of the digital image data stored in the digital registers to image data stored in a digital memory, thus forming a single composite image frame obtained from the successive overlapping image frames, and storing the composite image frame in the digital memory,

wherein each successive image frame is offset from an immediately preceding image frame by a spacing of greater than a single pixel, such that each addition, by the digital adders of image data stored in the digital registers to image data stored in the digital memory adds two or more new pixel lines of data to the composite image frame.

4. An imaging method comprising:

generating image data corresponding to a plurality of successive overlapping image frames;

converting the image data into digital image data corresponding to the plurality of successive overlapping image frames;

storing the digital image data in a plurality of digital registers;

adding values of the digital image data stored in the digital registers to image data stored in a digital memory, thus forming a single, composite image frame obtained from the successive overlapping image frames; and

storing the composite image frame in the digital memory;

wherein each successive image frame is offset from an immediately preceding image frame by a spacing of not greater than a single pixel, such that the adding the values of the digital image data comprises adding a new single pixel line to the composite image frame.

5. The imaging method according to claim 4, wherein the generating the image data comprises:

repeatedly;

acquiring an image frame of an object using an array of sensor elements and advancing one of the object and the array of sensor elements with respect to the other of the object and the array of sensor elements, by a distance corresponding to one pixel.

6. An imaging method comprising:

generating image data corresponding to a plurality of successive overlapping image frames;

converting the image data into digital image data corresponding to the plurality of successive overlapping image frames;

storing the digital image data in a plurality of digital registers;

adding values of the digital image data stored in the digital registers to image data stored in a digital memory, thus forming a single, composite image frame obtained from the successive overlapping image frames; and

storing the composite image frame in the digital memory;

wherein each successive image frame is offset from an immediately preceding image frame by a spacing of greater than a single pixel, such that the adding the values of the digital image data comprises adding two or more new pixel lines to the composite image frame.

7. The imaging method according to claim 6, wherein the generating the image data comprises:

repeatedly;

acquiring an image frame of an object using an array of sensor elements and advancing one of the object and the array of sensor elements with respect to the other of the object and the array of sensor elements, by a distance corresponding to more than one pixel.

8. An imaging device, comprising

a two-dimensional array of sensor elements which generates image data corresponding to a plurality of successive overlapping image frames;

an A/D converter which converts the image data into digital image data corresponding to the plurality of successive overlapping image frames;

a plurality of digital registers which store the digital image data received from the A/D converter;

a plurality of digital adders which add values of the digital image data stored in the digital registers to image data stored in a digital memory, thus forming a single composite image frame obtained from the successive overlapping image frames, and storing the composite image frame in the digital memory,

wherein each successive image frame is offset from an immediately preceding image frame in two perpendicular directions by a spacing of not greater than a single pixel in either direction, such that each addition, by the digital adders of image data stored in the digital registers to image data stored in the digital memory adds a new single pixel line of data to the composite image frame along each of a first edge and a second edge of the composite image frame.

9. An imaging method comprising:

generating image data corresponding to a plurality of successive overlapping image frames;

converting the image data into digital image data corresponding to the plurality of successive overlapping image frames;

storing the digital image data in a plurality of digital registers;

adding values of the digital image data stored in the digital registers to image data stored in a digital memory, thus forming a single, composite image frame obtained from the successive overlapping image frames; and

storing the composite image frame in the digital memory;

wherein each successive image frame is offset from an immediately preceding image frame in two perpendicular directions by a spacing of not greater than a single pixel in either direction, such that each addition, by the digital adders of image data stored in the digital registers to image data stored in the digital memory adds a new single pixel line of data to the composite image frame along each of a first edge and a second edge of the composite image frame.