Mask Frame Assembly for Thin Film Deposition
First Claim
Patent Images
1. A mask frame assembly for a thin film deposition, the mask frame assembly comprising:
- a mask frame including an opening and frames surrounding the opening; and
a mask coupled to the mask frame;
wherein a deformation prevention unit is formed on at least one region of the mask.
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Accused Products
Abstract
A mask frame assembly for depositing a deposition material on a deposition substrate comprises a mask frame including an opening and frames surrounding the opening, and a mask coupled on the mask frame. A deformation prevention unit is formed on at least one region of the mask. Since the deformation prevention unit is formed on a peripheral portion of a deposition pattern in the mask, deformation of the mask in a vertical direction may be reduced. Accordingly, defective attaching of the mask to the substrate may be reduced.
78 Citations
17 Claims
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1. A mask frame assembly for a thin film deposition, the mask frame assembly comprising:
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a mask frame including an opening and frames surrounding the opening; and a mask coupled to the mask frame; wherein a deformation prevention unit is formed on at least one region of the mask. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification