METHOD FOR DETERMINING A RECONSTRUCTED IMAGE USING A PARTICLE-OPTICAL APPARATUS
First Claim
1. Method for determining a reconstructed image using a particle-optical apparatus, the particle-optical apparatus comprising:
- a particle source for producing a beam of particles,an object plane on which an object to be imaged may be placed,a condenser system for illuminating the object plane with the beam of particles,a projection system for forming an image of the object plane by imaging particles transmitted through the object on an image plane, anda detector for detecting the image, the detector comprising a semiconductor sensor having an array of pixels for providing a plurality of pixel signals from respective pixels of the array in response to particles incident on the detector,the method comprising;
receiving the plurality of pixel signals, anddetermining a reconstructed image from using Viterbi Detection on the plurality of pixel signals,the Viterbi Detection using a plurality of different states corresponding to a plurality of configurations of particles incident on the detector, andat least two states of the plurality of different states corresponding to a same, non-zero multiplicity of incident particles on a single pixel of the plurality of pixel signals.
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Abstract
The invention relates to a method for determining a reconstructed image using a particle-optical apparatus. The particle-optical apparatus comprises a particle source for producing a beam of particles, an object plane on which an object to be imaged may be placed, a condenser system for illuminating the object plane with the beam of particles, a projection system for forming an image of the object plane by imaging particles transmitted through the object on an image plane, and a detector for detecting the image, the detector comprising a semiconductor sensor having an array of pixels for providing a plurality of pixel signals from respective pixels of the array in response to particles incident on the detector.
23 Citations
20 Claims
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1. Method for determining a reconstructed image using a particle-optical apparatus, the particle-optical apparatus comprising:
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a particle source for producing a beam of particles, an object plane on which an object to be imaged may be placed, a condenser system for illuminating the object plane with the beam of particles, a projection system for forming an image of the object plane by imaging particles transmitted through the object on an image plane, and a detector for detecting the image, the detector comprising a semiconductor sensor having an array of pixels for providing a plurality of pixel signals from respective pixels of the array in response to particles incident on the detector, the method comprising; receiving the plurality of pixel signals, and determining a reconstructed image from using Viterbi Detection on the plurality of pixel signals, the Viterbi Detection using a plurality of different states corresponding to a plurality of configurations of particles incident on the detector, and at least two states of the plurality of different states corresponding to a same, non-zero multiplicity of incident particles on a single pixel of the plurality of pixel signals. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
combining the first reconstructed image and the second reconstructed image to form the reconstructed image.
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13. Method according to claim 1, further comprising:
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producing a beam of particles, placing an object to be imaged on an object plane, illuminating the object plane with the beam of particles, forming an image of the object plane by imaging particles transmitted through the object on an image plane, and detecting the image with the detector comprising the semiconductor sensor and providing a plurality of pixel signals from the respective pixels of the array in response to the particles incident on the detector.
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14. Particle-optical apparatus comprising:
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a particle source for producing a beam of particles, an object plane on which an object to be imaged may be placed, a condenser system for illuminating the object plane with the beam of particles, a projection system for forming an image of the object plane by imaging particles transmitted through the object on an image plane, a detector for detecting the image, the detector comprising a semiconductor sensor having an array of pixels for providing a plurality of pixel signals from respective pixels of the array in response to particles incident on the detector, and a signal processor arranged to perform the method of claim 1.
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15. A computer program product comprising instructions for causing a processor system to perform the method according to claim 1.
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16. A method according to claim 8, wherein the states of the Viterbi Detection correspond to predetermined two-dimensional configurations of particles incident on the detector.
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17. A method for determining a reconstructed image using a particle-optical apparatus, comprising:
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providing a particle optical apparatus having a detector for detecting an image, the detector providing a plurality of pixel signals from respective pixels in response to particles incident on the detector. receiving the plurality of pixel signals; and determining a reconstructed image from using Viterbi Detection on the plurality of pixel signals, the Viterbi Detection using a plurality of different states corresponding to a plurality of configurations of particles incident on the detector, and at least two states of the plurality of different states corresponding to a same, non-zero multiplicity of incident particles on a single pixel of the plurality of pixel signals. - View Dependent Claims (18, 19, 20)
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Specification