MEMS ANCHOR AND SPACER STRUCTURE
First Claim
1. A display apparatus comprising:
- a first substrate;
a plurality of microelectromechanical system (MEMS) light modulators formed from a structural material coupled to the first substrate;
a second substrate separated from the first substrate; and
a plurality of spacers extending from the first, the spacers including;
a first polymer layer having a surface in contact with the first substrate;
a second polymer layer encapsulating the first polymer layer; and
a layer of the structural material encapsulating the second polymer layer.
2 Assignments
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Accused Products
Abstract
A display apparatus includes a first substrate, a plurality of microelectromechanical systems (MEMS) light modulators formed from a structural material coupled to the first substrate and a second substrate separated from the first substrate. A plurality of spacers extend from the first substrate to keep the second substrate a minimum distance away from the plurality of light modulators. The spacers include a first polymer layer having a surface in contact with the first substrate, a second polymer layer encapsulating the first polymer layer and a layer of the structural material encapsulating the second polymer layer. The spacers can be used as fluid barriers and configured to surround more than one but less than all of the MEMS light modulators in the display apparatus.
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Citations
54 Claims
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1. A display apparatus comprising:
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a first substrate; a plurality of microelectromechanical system (MEMS) light modulators formed from a structural material coupled to the first substrate; a second substrate separated from the first substrate; and a plurality of spacers extending from the first, the spacers including; a first polymer layer having a surface in contact with the first substrate; a second polymer layer encapsulating the first polymer layer; and a layer of the structural material encapsulating the second polymer layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An apparatus comprising:
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a first substrate; at least one microelectromechanical system (MEMS) device formed from a structural material and coupled to the first substrate; a second substrate separated from the first substrate; and a plurality of spacers extending from the first substrate, the spacers including a first polymer layer, a second polymer layer and a plasma enhanced chemical vapor deposition (PECVD)-deposited layer of the structural material which substantially encapsulates the first and second polymer layers. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. An apparatus comprising:
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a first substrate; at least one microelectromechanical system (MEMS) device formed from a light absorbing structural material and supported over the first substrate; a second substrate separated from the first substrate; and a plurality of spacers extending from the first substrate the spacers including; a first polymer layer having a surface in contact with the first substrate; a second polymer layer; and a layer of the light absorbing structural material encapsulating the first and second polymer layers, the layer of the light absorbing structural material absorbing at least about 80% of light impinging on the light absorbent layer of the structural material. - View Dependent Claims (20, 21, 22, 23, 24)
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25. An apparatus comprising:
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a first substrate; at least one microelectromechanical system (MEMS) device formed from a structural material and connected to the first substrate; a second substrate separated from the first substrate; and a plurality of spacers extending from the first substrate, the plurality of spacers including; a first polymer layer having a surface in contact with the first substrate; a second polymer layer having a surface in contact with the first polymer layer; and a plasma enhanced chemical vapor deposition (PECVD)-deposited layer of the structural material encapsulating the first and second polymer layers. - View Dependent Claims (26, 27, 28, 29, 30, 31)
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32. A display apparatus comprising:
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a first substrate; a plurality of microelectromechanical system (MEMS) light modulators formed from a structural material coupled to the first substrate; a second substrate separated from the first substrate; and at least one anchor for suspending at least one of the plurality of MEMS light modulators over the first substrate, the anchor including; a first polymer layer having a surface in contact with the first substrate; a second polymer layer having a surface in contact with the first polymer layer; and a layer of the structural material encapsulating the first and second polymer layers. - View Dependent Claims (33, 34, 35, 36, 37, 38)
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39. A display apparatus comprising:
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a first substrate; a plurality of microelectromechanical system (MEMS) light modulators suspended over the first substrate; a second substrate separated from the first substrate; and a fluid barrier substantially enclosing more than one but less than all of the MEMS light modulators, wherein the fluid barrier extends from the first substrate and is configured for interfering with flow of fluid across the display towards the enclosed MEMS light modulators. - View Dependent Claims (40, 41, 42, 43)
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44. An apparatus comprising:
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a first substrate; a plurality of microelectromechanical system (MEMS) devices connected to the first substrate and formed from a structural material; a second substrate separated from the first substrate; and a fluid barrier comprising a plurality of spacers comprising a first polymer layer, a second polymer layer and a layer of the structural material, wherein the first polymer layer is encapsulated by the first substrate and the layer of the structural material. - View Dependent Claims (45, 46)
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47. An apparatus comprising:
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a first substrate; a plurality of microelectromechanical system (MEMS) devices supported by the first substrate; a second substrate separated from the first substrate; and a fluid barrier comprising a plurality of spacers configured to substantially enclose more than one MEMS device and less than all of the plurality of MEMS devices. - View Dependent Claims (48, 49, 50)
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51. A method for manufacturing a display assembly comprising:
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forming an anchor and a spacer that includes a first polymer layer and a second polymer layer encapsulated by a layer of structural material, wherein forming the anchor and the spacer comprises depositing the first polymer layer on the first transparent substrate; patterning and curing the first polymer layer; after patterning and curing the first polymer layer, depositing the second polymer layer on the first transparent substrate and on top of the remainder of the first polymer layer; patterning and curing the second polymer layer; depositing a layer of structural material over the first polymer layer and the second polymer layer using plasma enhanced chemical vapor deposition (PECVD); patterning and etching the layer of structural material to form the anchor and the spacer; and removing remaining portions of the first and second polymer layers to release the anchor and the spacer such that the spacer includes the first polymer layer and the second polymer layer substantially encapsulated by the layer of structural material. - View Dependent Claims (52, 53, 54)
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Specification