FORMATION OF EMBEDDED STRESSOR THROUGH ION IMPLANTATION
First Claim
1. An extremely-thin silicon-on-insulator transistor comprising:
- a buried oxide layer above a substrate;
a silicon layer above the buried oxide layer;
a gate stack on the silicon layer comprising at least a gate dielectric formed on the silicon layer and a gate conductor formed on the gate dielectric; and
a gate spacer having a first part on the silicon layer, and a second part adjacent to the gate stack;
a first raised source/drain region and a second raised source/drain region each having a first part comprising a portion of the silicon layer and a second part adjacent to the gate spacer; and
at least one embedded stressor formed at least partially within the substrate that imparts a predetermined stress on a silicon channel region formed within the silicon layer.
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Accused Products
Abstract
An extremely-thin silicon-on-insulator transistor includes a buried oxide layer above a substrate. The buried oxide layer, for example, has a thickness that is less than 50 nm. A silicon layer is above the buried oxide layer. A gate stack is on the silicon layer includes at least a gate dielectric formed on the silicon layer and a gate conductor formed on the gate dielectric. A gate spacer has a first part on the silicon layer and a second part adjacent to the gate stack. A first raised source/drain region and a second raised source/drain region each have a first part that includes a portion of the silicon layer and a second part adjacent to the gate spacer. At least one embedded stressor is formed at least partially within the substrate that imparts a predetermined stress on a silicon channel region formed within the silicon layer.
72 Citations
20 Claims
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1. An extremely-thin silicon-on-insulator transistor comprising:
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a buried oxide layer above a substrate; a silicon layer above the buried oxide layer; a gate stack on the silicon layer comprising at least a gate dielectric formed on the silicon layer and a gate conductor formed on the gate dielectric; and a gate spacer having a first part on the silicon layer, and a second part adjacent to the gate stack; a first raised source/drain region and a second raised source/drain region each having a first part comprising a portion of the silicon layer and a second part adjacent to the gate spacer; and at least one embedded stressor formed at least partially within the substrate that imparts a predetermined stress on a silicon channel region formed within the silicon layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for fabricating an extremely-thin-silicon-on-insulator transistor, the method comprising:
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forming a buried oxide layer on a silicon substrate; forming a silicon layer on the buried oxide layer; forming a gate stack on the silicon layer that is above the buried oxide layer; forming a gate spacer on the silicon layer and on sidewalls of the gate stack; epitaxially forming a first raised source/drain region and a second raised source/drain region each adjacent to the gate spacer; and forming at least one embedded stressor at least partially within the substrate that imparts a predetermined stress on a silicon channel region formed within the silicon layer. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. An integrated circuit comprising:
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a circuit supporting substrate having an electrical circuit disposed thereon; and an extremely-thin silicon-on-insulator transistor comprising; a buried oxide layer above a substrate; a silicon layer above the buried oxide layer; a gate stack on the silicon layer comprising at least a gate dielectric formed on the silicon layer and a gate conductor formed on the gate dielectric; and a gate spacer having a first part on the silicon layer, and a second part adjacent to the gate stack; a first raised source/drain region and a second raised source/drain region each having a first part comprising a portion of the silicon layer and a second part adjacent to the gate spacer; and at least one embedded stressor formed at least partially within the substrate that imparts a predetermined stress on a silicon channel region formed within the silicon layer. - View Dependent Claims (19, 20)
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Specification