Low Variability Robot
First Claim
1. An apparatus comprising:
- a frame comprising at least three members including at least two links forming a movable arm and an end effector, where the end effector and the links are connected by movable joints, where the end effector is configured to support a substrate thereon;
a first position sensor on the frame proximate a first one of the joints, where the first position sensor is configured to sense a position of two of the members relative to each other;
a drive connected to the frame, where the drive is configured to move the movable arm; and
a chamber, where the frame is located in the chamber and the drive extends through a wall in the chamber.
4 Assignments
0 Petitions
Accused Products
Abstract
An apparatus including a frame, a first position sensor, a drive and a chamber. The frame has at least three members including at least two links forming a movable arm and an end effector. The end effector and the links are connected by movable joints. The end effector is configured to support a substrate thereon. The first position sensor is on the frame proximate a first one of the joints. The first position sensor is configured to sense a position of two of the members relative to each other. The drive is connected to the frame. The drive is configured to move the movable arm. The frame is located in the chamber, and the drive extends through a wall in the chamber.
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Citations
30 Claims
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1. An apparatus comprising:
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a frame comprising at least three members including at least two links forming a movable arm and an end effector, where the end effector and the links are connected by movable joints, where the end effector is configured to support a substrate thereon; a first position sensor on the frame proximate a first one of the joints, where the first position sensor is configured to sense a position of two of the members relative to each other; a drive connected to the frame, where the drive is configured to move the movable arm; and a chamber, where the frame is located in the chamber and the drive extends through a wall in the chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. An apparatus comprising:
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an electrical device; a frame having the electrical device thereon, where the frame comprises at least three members including at least two links forming a movable arm and an end effector, where the end effector and the links are connected by movable joints, where the end effector is configured to support a substrate thereon; a drive connected to the movable arm, where the drive is configured to move the movable arm; and a heat transfer system at the drive, where the heat transfer system is configured to transfer heat from the movable arm to a spaced distance from the movable arm. - View Dependent Claims (20, 21, 22, 23)
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24. An apparatus comprising:
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a frame comprising at least three members including at least two links forming a movable arm and an end effector, where the end effector and the links are connected by movable joints, where the end effector is configured to support a substrate thereon; a first position sensor on the frame proximate a first one of the joints, where the first position sensor is configured to sense a position of two of the members relative to each other; and a communications link connected to the first position sensor, where the communications link is configured to transmit signals to a device spaced from the movable arm through an airtight enclosure. - View Dependent Claims (25, 26, 27, 28, 29, 30)
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Specification