BULK ACOUSTIC RESONATOR COMPRISING PIEZOELECTRIC LAYER AND INVERSE PIEZOELECTRIC LAYER
First Claim
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1. A bulk acoustic wave (BAW) resonator structure, comprising:
- a first electrode disposed over a substrate;
a first piezoelectric layer disposed over the first electrode, the first piezoelectric layer having a first c-axis oriented along a first direction;
a second electrode disposed over the first piezoelectric layer; and
a second piezoelectric layer disposed over the first electrode and adjacent to the first piezoelectric layer, wherein the second piezoelectric layer has a second c-axis oriented in a second direction that is substantially antiparallel to the first direction.
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Abstract
In a representative embodiment, a bulk acoustic wave (BAW) resonator, comprises: a first electrode disposed over a substrate; a first piezoelectric layer disposed over the first electrode, the first piezoelectric layer having a first c-axis oriented along a first direction; a second electrode disposed over the first piezoelectric layer; and a second piezoelectric layer disposed over the first electrode and adjacent to the first piezoelectric layer, wherein the second piezoelectric layer has a second c-axis oriented in a second direction that is substantially antiparallel to the first direction.
31 Citations
20 Claims
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1. A bulk acoustic wave (BAW) resonator structure, comprising:
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a first electrode disposed over a substrate; a first piezoelectric layer disposed over the first electrode, the first piezoelectric layer having a first c-axis oriented along a first direction; a second electrode disposed over the first piezoelectric layer; and a second piezoelectric layer disposed over the first electrode and adjacent to the first piezoelectric layer, wherein the second piezoelectric layer has a second c-axis oriented in a second direction that is substantially antiparallel to the first direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A bulk acoustic wave (BAW) resonator structure, comprising:
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a first electrode disposed over a substrate; a first piezoelectric layer disposed over the first electrode, the first piezoelectric layer having a first c-axis oriented along a first direction; a second electrode disposed over the first piezoelectric layer; a second piezoelectric layer disposed over the first electrode and adjacent to the first piezoelectric layer, the second piezoelectric layer having a second c-axis oriented along a second direction that is substantially antiparallel to the first direction; a third piezoelectric layer disposed over the second electrode, the third piezoelectric layer having a third c-axis oriented parallel to the first direction; a third electrode disposed over the third piezoelectric layer; a fourth piezoelectric layer disposed over the second electrode and adjacent to the third piezoelectric layer, the second piezoelectric layer having a fourth c-axis oriented parallel to the second direction. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification