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METROLOGY APPARATUS

  • US 20130111774A1
  • Filed: 07/20/2011
  • Published: 05/09/2013
  • Est. Priority Date: 07/21/2010
  • Status: Active Grant
First Claim
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1. Metrology apparatus, comprising a first structure rotatably connected to a second structure by a bearing arrangement, the bearing arrangement including at least a first friction bearing comprising parts in sliding contact during rotation of the first structure relative to the second structure, wherein the apparatus comprises at least one magnet that relieves the load on the first friction bearing.

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