LIQUID DISPENSING SYSTEMS ENCOMPASSING GAS REMOVAL

• US 20130168410A1
• Filed: 12/13/2012
• Published: 07/04/2013
• Est. Priority Date: 06/13/2006
• Status: Active Grant

• Current Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Ware, Donald D., Tom, Glenn M., Dathe, Paul, Koland, Amy, Gerold, Jason, Mikkelsen, Kirk, O'Dougherty, Kevin T., Cisewski, Michael A.
• Granted Patent: US 9,120,616 B2
• Time in Patent Office: Days
• US Class Current: 222/1
• CPC Class Codes: B65D 83/62 by membrane, bag, or the like containers in which the content is delivered by the contracting forces inherent in the bag B65D83/0061
• CPC Class Codes: B67D 7/0261 specially adapted for transferring liquids of high purity
• CPC Class Codes: B67D 7/763 of air separators
• CPC Class Codes: Y10T 137/313 Gas carried by or evolved from liquid

Abstract

Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.

Claims

1. A fluid dispensing system arranged to supply fluid to a point of use, the fluid dispensing system comprising:

a first pressure dispense package including a first vessel that defines a first interior volume, a first collapsible liner arranged within the first vessel and arranged to hold fluid susceptible to presence of headspace gas within the first liner, and a first dispensing port in fluid communication with an interior of the first liner;

a second pressure dispense package including a second vessel that defines a second interior volume, a second collapsible liner arranged within the second vessel and arranged to hold fluid susceptible to presence of headspace gas within the second liner, and a second dispensing port in fluid communication with an interior of the second liner;

a first gas removal apparatus arranged to receive gas from the first pressure dispense package before pressure dispensation of fluid from the first pressure dispense apparatus to the point of use; and

a second gas removal apparatus arranged to receive gas from the second pressure dispense package before pressure dispensation of fluid from the second pressure dispense apparatus to the point of use; and

at least one sensor arranged to detect a condition indicative of exhaustion or approach to exhaustion of fluid dispensed from at least one of the first pressure dispense package and the second pressure dispense package;

wherein the second gas removal apparatus is arranged to remove headspace gas from the second pressure dispense package while the first pressure dispense package is dispensing fluid to the point of use; and

wherein the fluid dispensing system is arranged to automatically initiate dispensing of fluid from the second pressure dispense package to the point of use following detection by the at least one sensor of a condition indicative of exhaustion or approach to exhaustion of fluid dispensed from the first pressure dispense package.

2. The fluid dispensing system of claim 1, wherein the first gas removal apparatus comprises a first ventable reservoir arranged to receive fluid from the first pressure dispense package, and the second gas removal apparatus comprises a second ventable reservoir arranged to receive fluid from the second pressure dispense package.

3. The fluid dispensing system of claim 2, wherein each of the first ventable reservoir and the second ventable reservoir respectively comprises (i) a reservoir sensor arranged to sense accumulation of gas within the respective reservoir, and to responsively generate an output signal indicative of such condition, and (ii) at least one control element adapted to effect removal of gas from the respective reservoir responsive to the output signal.

4. The fluid dispensing system of claim 3, wherein the output signal is indicative of any of:

presence of a gas, absence of a gas, presence of a liquid, absence of a liquid, presence of a bubble, and presence of a liquid-gas interface.

5. The fluid dispensing system of claim 3, wherein the sensor comprises at least one of:

a capacitive sensor, a photosensor, and optical sensor, and a teachable sensor.

6. The fluid dispensing system of claim 2, wherein each of the first ventable reservoir and the second ventable reservoir separately includes a fluid inlet, a liquid outlet, and a gas outlet that is located higher than the liquid outlet.

7. The fluid dispensing system of claim 1, further comprising a first dispense connector arranged to physically couple with the first vessel and receive fluid from the first collapsible liner, and a second dispense connector arranged to physically couple with the second vessel and receive fluid from the second collapsible liner.

8. The fluid dispensing system of claim 7, wherein the first dispense connector comprises a first dip tube or probe insertable into the first liner, and the second dispense connector comprises a second dip tube or probe insertable into the second liner.

9. The fluid dispensing system of claim 7, wherein the first dispense connector comprises a first ventable reservoir arranged to receive fluid from the first collapsible liner, and the second dispensing connector comprises a second ventable reservoir arranged to receive fluid from the second collapsible liner.

10. The fluid dispensing system of claim 7, wherein the at least one sensor comprises a first sensor associated with the first dispense connector, and a second sensor associated with the second dispense connector.

11. The fluid dispensing system of claim 1, wherein the at least one sensor comprises a pressure sensor arranged to sense pressure of fluid dispensed from at least one of the first pressure dispense package and the second pressure dispense package to the point of use.

12. The fluid dispensing system of claim 1, wherein the at least one sensor comprises at least one pressure sensor arranged to compare the following items (i) and (ii):

(i) pressure of fluid dispensed from at least one of the first pressure dispense package and the second pressure dispense package to the point of use, and (ii) pressure of gas supplied to at least one of the first pressure dispense package and the second pressure dispense package.

13. The fluid dispensing system of claim 1, further comprising a pressurized gas source arranged to supply pressurized gas to at least one of the first pressure dispense package and the second pressure dispense package for pressure dispensing of fluid therefrom.

14. The fluid dispensing system of claim 2, further comprising at least one filter arranged for any of (1) preventing passage of particles through a flow regulation device associated with at least of the first pressure dispense package and the second pressure dispense package, and (2) restricting the passage of bubbles into at least one of the first reservoir and the second reservoir.

15. The fluid dispensing system of claim 1, wherein the fluid comprises a chemical reagent and the point of use comprises a fluid-utilizing process tool.

16. A microelectronic product manufacturing facility comprising the fluid dispensing system of claim 1 arranged to supply a chemical reagent to a microelectronic device process tool or semiconductor process tool.

17. A method utilizing the fluid dispensing system of claim 1 for dispensing fluid to a point of use, the method comprising:

removing headspace gas from the first pressure dispense package using the first gas removal apparatus;

applying pressure to the first collapsible liner to dispense fluid from the first pressure dispense package to the point of use; and

removing headspace gas from the second pressure dispense package using the second gas removal apparatus while the first pressure dispense package is dispensing fluid to the point of use.

18. The method of claim 17, further comprising detecting a condition indicative of exhaustion or approach to exhaustion of fluid dispensed from the first pressure dispense package, and responsive to said detection, initiating pressure dispensing of fluid from the second pressure dispense package to the point of use.

19. The method of claim 18, wherein said detecting of a condition indicative of exhaustion or approach to exhaustion of fluid dispensed from the first pressure dispense package comprises monitoring pressure of fluid dispensed from the first pressure dispense package and detecting a pressure droop condition.

20. The method of claim 17, wherein removing headspace gas from the first pressure dispense package comprises flowing headspace gas into a first ventable reservoir associated with the first pressure dispense package and venting gas from the first ventable reservoir, and wherein removing gas from the second pressure dispense package comprises flowing headspace gas into a second ventable reservoir associated with the second pressure dispense package and venting gas from the second ventable reservoir.