SEMICONDUCTOR MEMORY DEVICE
First Claim
1. A semiconductor memory device comprising:
- a memory cell comprising;
a first transistor comprising;
a first semiconductor layer;
a first gate insulating layer over and in contact with the first semiconductor layer;
a first gate electrode which is in contact with the first gate insulating layer and overlaps with the first semiconductor layer; and
a source region and a drain region with a region of the first semiconductor layer overlapping with the first gate electrode located between the source region and the drain region;
a second transistor comprising;
a second semiconductor layer which overlaps with the first gate electrode and is electrically connected to the first gate electrode;
a second gate insulating layer in contact with a side surface of the second semiconductor layer; and
a second gate electrode which is in contact with the second gate insulating layer and at least partly covers the side surface of the second semiconductor layer; and
a capacitor comprising;
a capacitor layer in contact with a side surface of the first gate electrode; and
a first capacitor electrode which is in contact with the capacitor layer and at least partly covers the side surface of the first gate electrode.
1 Assignment
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Accused Products
Abstract
To provide a highly integrated semiconductor memory device. To provide a semiconductor memory device which can hold stored data even when power is not supplied. To provide a semiconductor memory device which has a large number of write cycles. The degree of integration of a memory cell array is increased by forming a memory cell including two transistors and one capacitor which are arranged three-dimensionally. The electric charge accumulated in the capacitor is prevented from being leaking by forming a transistor for controlling the amount of electric charge of the capacitor in the memory cell using a wide-gap semiconductor having a wider band gap than silicon. Accordingly, a semiconductor memory device which can hold stored data even when power is not supplied can be provided.
21 Citations
10 Claims
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1. A semiconductor memory device comprising:
a memory cell comprising; a first transistor comprising; a first semiconductor layer; a first gate insulating layer over and in contact with the first semiconductor layer; a first gate electrode which is in contact with the first gate insulating layer and overlaps with the first semiconductor layer; and a source region and a drain region with a region of the first semiconductor layer overlapping with the first gate electrode located between the source region and the drain region; a second transistor comprising; a second semiconductor layer which overlaps with the first gate electrode and is electrically connected to the first gate electrode; a second gate insulating layer in contact with a side surface of the second semiconductor layer; and a second gate electrode which is in contact with the second gate insulating layer and at least partly covers the side surface of the second semiconductor layer; and a capacitor comprising; a capacitor layer in contact with a side surface of the first gate electrode; and a first capacitor electrode which is in contact with the capacitor layer and at least partly covers the side surface of the first gate electrode. - View Dependent Claims (2, 3, 4, 5)
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6. A semiconductor memory device comprising:
a memory cell comprising; a first transistor comprising; a first semiconductor layer; a first gate insulating layer over and in contact with the first semiconductor layer; a first gate electrode which is in contact with the first gate insulating layer and overlaps with the first semiconductor layer; and a source region and a drain region with a region of the first semiconductor layer overlapping with the first gate electrode located between the source region and the drain region; a second transistor comprising; a second semiconductor layer which overlaps with the first gate electrode and is electrically connected to the first gate electrode; a second gate insulating layer in contact with a side surface of the second semiconductor layer; and a second gate electrode which is in contact with the second gate insulating layer and at least partly covers the side surface of the second semiconductor layer; and a capacitor comprising; a second capacitor electrode electrically connecting the first gate electrode to the second semiconductor layer; a capacitor layer in contact with the second capacitor electrode; and a first capacitor electrode which is in contact with the capacitor layer and at least partly covers a side surface of the second capacitor electrode. - View Dependent Claims (7, 8, 9, 10)
Specification