ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, OPTICAL ELEMENT AND MANUFACTURING METHOD THEREOF, AND DEVICE MANUFACTURING METHOD
First Claim
1. An illumination optical system which illuminates a surface to be illuminated on the basis of light from a light source, the illumination optical system comprising:
- a first optical path in which a diffractive optical element can be arranged at a first position thereof;
a second optical path in which a spatial light modulator with a plurality of optical elements arrayed two-dimensionally and controlled individually can be arranged at a second position thereof; and
a third optical path which is an optical path of light having passed via at least one of the first optical path and the second optical path and in which a distribution forming optical system is arranged,wherein the distribution forming optical system forms a predetermined light intensity distribution on an illumination pupil located in the third optical path, based on the light having passed via at least one of the first and second optical paths.
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Accused Products
Abstract
An illumination optical system which illuminates a surface to be illuminated on the basis of light from a light source has a first optical path in which a diffractive optical element can be arranged at a first position thereof; a second optical path in which a spatial light modulator with a plurality of optical elements arrayed two-dimensionally and controlled individually can be arranged at a second position thereof; and a third optical path which is an optical path of light having passed via at least one of the first optical path and the second optical path and in which a distribution forming optical system is arranged. The distribution forming optical system forms a predetermined light intensity distribution on an illumination pupil located in the third optical path, based on the light having passed via at least one of the first and second optical paths.
1 Citation
18 Claims
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1. An illumination optical system which illuminates a surface to be illuminated on the basis of light from a light source, the illumination optical system comprising:
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a first optical path in which a diffractive optical element can be arranged at a first position thereof; a second optical path in which a spatial light modulator with a plurality of optical elements arrayed two-dimensionally and controlled individually can be arranged at a second position thereof; and a third optical path which is an optical path of light having passed via at least one of the first optical path and the second optical path and in which a distribution forming optical system is arranged, wherein the distribution forming optical system forms a predetermined light intensity distribution on an illumination pupil located in the third optical path, based on the light having passed via at least one of the first and second optical paths. - View Dependent Claims (2, 3, 4, 5, 9, 10, 11, 12, 13)
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6. An illumination optical system which illuminates a surface to be illuminated on the basis of light from a light source, the illumination optical system comprising:
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a spatial light modulator with a plurality of optical elements arrayed two-dimensionally and controlled individually; and a distribution forming optical system which forms a predetermined light intensity distribution on an illumination pupil, based on light having passed via the spatial light modulator, wherein the plurality of optical elements of the spatial light modulator are selectively located between a position in an optical path of the illumination optical system and a position off the optical path of the illumination optical system. - View Dependent Claims (7, 8, 14, 15, 16, 17, 18)
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Specification