FLUID CONTROL SYSTEM AND FLUID CONTROL METHOD
First Claim
1. A fluid control system comprising:
- a gas supply source to supply gas which is a fluid to the vacuum chamber;
an exhaust pipe to discharge the fluid from the vacuum chamber;
a gas supply pipe to connect the vacuum chamber and the gas supply source;
a pressure sensor to detect an internal pressure of the vacuum chamber;
a flowmeter placed on the gas supply pipe between the gas supply source and the vacuum chamber;
a proportional valve placed on the gas supply pipe between the flowmeter and the vacuum chamber;
a pressure controller to control the proportional valve in response to an output of the pressure sensor;
a metering valve placed on the exhaust pipe; and
a flow controller to control the metering valve in response to an output of the flowmeter.
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Accused Products
Abstract
A fluid control system includes a vacuum chamber, a gas supply source to supply gas as a fluid, an exhaust pipe to discharge the fluid from the vacuum chamber, a gas supply pipe to connect the vacuum chamber to the gas supply source, and a pressure sensor to detect an internal pressure of the vacuum chamber. This system further includes a flowmeter placed between the gas supply source and the vacuum chamber, a proportional valve placed between the flowmeter and the vacuum chamber, a pressure controller to control the proportional valve based on output of the pressure sensor, a metering valve placed on the exhaust pipe, and a flow controller to control the metering valve based on an output of the flowmeter.
21 Citations
9 Claims
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1. A fluid control system comprising:
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a gas supply source to supply gas which is a fluid to the vacuum chamber; an exhaust pipe to discharge the fluid from the vacuum chamber; a gas supply pipe to connect the vacuum chamber and the gas supply source; a pressure sensor to detect an internal pressure of the vacuum chamber; a flowmeter placed on the gas supply pipe between the gas supply source and the vacuum chamber; a proportional valve placed on the gas supply pipe between the flowmeter and the vacuum chamber; a pressure controller to control the proportional valve in response to an output of the pressure sensor; a metering valve placed on the exhaust pipe; and a flow controller to control the metering valve in response to an output of the flowmeter. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A fluid control method of controlling a fluid control system comprising:
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a gas supply source to supply gas which is a fluid to the vacuum chamber; an exhaust pipe to discharge the fluid from the vacuum chamber; a gas supply pipe to connect the vacuum chamber and the gas supply source; a pressure sensor to detect an internal pressure of the vacuum chamber; a flowmeter placed between the gas supply source and the vacuum chamber; a proportional valve placed between the flowmeter and the vacuum chamber; a pressure controller to control the proportional valve in response to an output of the pressure sensor; a metering valve placed on the exhaust pipe; and a flow controller to control the metering valve in response to an output of the flowmeter, wherein the metering valve is controlled to regulate a flow rate of the gas to a flow-rate set value.
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Specification