DEPOSITION METHOD

  • US 20130280414A1
  • Filed: 12/15/2010
  • Published: 10/24/2013
  • Est. Priority Date: 12/15/2010
  • Status: Active Grant
First Claim
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1. A deposition method, comprising:

  • placing fine particles whose surface is at least insulative in an airtight container;

    generating an aerosol of the fine particles while triboelectrically charging the fine particles by introducing a carrier gas into the airtight container;

    transporting the aerosol via a transfer tubing to a deposition chamber which is maintained at a pressure lower than that in the airtight container while charging the fine particles by friction with the inner surface of the transfer tubing connected to the airtight container and having a nozzle at the tip; and

    depositing the charged fine particles on a substrate placed in the deposition chamber by spraying the aerosol from the nozzle.

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