TRENCH SEMICONDUCTOR DEVICES WITH EDGE TERMINATION STRUCTURES, AND METHODS OF MANUFACTURE THEREOF
First Claim
1. A method for forming a semiconductor device, comprising:
- providing a semiconductor substrate having a top surface, a bottom surface, an active region, and an edge region;
forming a gate structure in a first trench in the active region of the semiconductor substrate, wherein the gate structure has a first side and a second side;
forming a termination structure in a second trench in the edge region of the semiconductor substrate, wherein the termination structure has an active region facing side and a device perimeter facing side;
forming first and second source regions of a first conductivity type in the semiconductor substrate adjacent both the first side and the second side of the gate structure; and
forming a third source region in the semiconductor substrate adjacent the active region facing side of the termination structure.
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Abstract
Embodiments of semiconductor devices and methods of their formation include providing a semiconductor substrate having a top surface, a bottom surface, an active region, and an edge region, and forming a gate structure in a first trench in the active region of the semiconductor substrate. A termination structure is formed in a second trench in the edge region of the semiconductor substrate. The termination structure has an active region facing side and a device perimeter facing side. The method further includes forming first and second source regions of the first conductivity type are formed in the semiconductor substrate adjacent both sides of the gate structure. A third source region is formed in the semiconductor substrate adjacent the active region facing side of the termination structure. The semiconductor device may be a trench metal oxide semiconductor device, for example.
35 Citations
25 Claims
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1. A method for forming a semiconductor device, comprising:
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providing a semiconductor substrate having a top surface, a bottom surface, an active region, and an edge region; forming a gate structure in a first trench in the active region of the semiconductor substrate, wherein the gate structure has a first side and a second side; forming a termination structure in a second trench in the edge region of the semiconductor substrate, wherein the termination structure has an active region facing side and a device perimeter facing side; forming first and second source regions of a first conductivity type in the semiconductor substrate adjacent both the first side and the second side of the gate structure; and forming a third source region in the semiconductor substrate adjacent the active region facing side of the termination structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for forming a trench metal oxide semiconductor device, comprising:
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providing a semiconductor substrate having a top surface, a bottom surface, an active region, and an edge region; forming a plurality of parallel gate structures in a plurality of parallel first trenches in the active region of the semiconductor substrate, wherein each of the gate structures has a first side and a second side; forming a termination structure in a second trench in the edge region of the semiconductor substrate, wherein the termination structure has an active region facing side and a device perimeter facing side; forming first and second source regions of a first conductivity type in the semiconductor substrate adjacent both the first sides and the second sides of the gate structures; and forming a third source region in the semiconductor substrate adjacent the active region facing side of the termination structure. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A semiconductor device, comprising:
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a semiconductor substrate having a top surface, a bottom surface, an active region, and an edge region; a gate structure formed in a first trench in the active region of the semiconductor substrate, wherein the gate structure has a first side and a second side; a termination structure formed in a second trench in the edge region of the semiconductor substrate, wherein the termination structure has an active region facing side and a device perimeter facing side; first and second source regions of a first conductivity type in the semiconductor substrate adjacent both the first side and the second side of the gate structure; and a third source region in the semiconductor substrate adjacent the active region facing side of the termination structure. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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Specification