WAFER-LEVEL FLIP CHIP DEVICE PACKAGES AND RELATED METHODS
First Claim
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1. A method of fabricating an electronic device, the method comprising:
- providing a wafer comprising a plurality of semiconductor layers;
forming a plurality of electrical contacts on a surface of the wafer, each electrical contact being in direct contact with at least one of the semiconductor layers thereunder, thereby defining a plurality of unsingulated chips each comprising a plurality of the electrical contacts;
thereafter, and without formation of a metallic or conductive layer on the electrical contacts therebetween, applying an anisotropic conductive adhesive (ACA) onto the surface of the wafer and in direct contact with each of the electrical contacts;
thereafter, singulating the wafer into individual chips, each chip comprising first and second electrical contacts with the ACA thereover;
providing a substrate having first and second conductive traces on a first surface thereof in a bonding region, the first and second conductive traces being separated by a gap therebetween;
positioning first and second electrical contacts of one of the chips over the first and second conductive traces, a portion of the ACA being disposed between the electrical contacts and the traces; and
bonding the first and second electrical contacts of the chip to the first and second traces, respectively, thereby establishing electrical connection between at least one of (i) the first electrical contact and the first trace or (ii) the second electrical contact and the second trace, but without electrically bridging the traces together or electrically bridging the electrical contacts together.
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Abstract
In accordance with certain embodiments, semiconductor dies are at least partially coated with a conductive adhesive prior to singulation and subsequently bonded to a substrate having electrical traces thereon.
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Citations
19 Claims
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1. A method of fabricating an electronic device, the method comprising:
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providing a wafer comprising a plurality of semiconductor layers; forming a plurality of electrical contacts on a surface of the wafer, each electrical contact being in direct contact with at least one of the semiconductor layers thereunder, thereby defining a plurality of unsingulated chips each comprising a plurality of the electrical contacts; thereafter, and without formation of a metallic or conductive layer on the electrical contacts therebetween, applying an anisotropic conductive adhesive (ACA) onto the surface of the wafer and in direct contact with each of the electrical contacts; thereafter, singulating the wafer into individual chips, each chip comprising first and second electrical contacts with the ACA thereover; providing a substrate having first and second conductive traces on a first surface thereof in a bonding region, the first and second conductive traces being separated by a gap therebetween; positioning first and second electrical contacts of one of the chips over the first and second conductive traces, a portion of the ACA being disposed between the electrical contacts and the traces; and bonding the first and second electrical contacts of the chip to the first and second traces, respectively, thereby establishing electrical connection between at least one of (i) the first electrical contact and the first trace or (ii) the second electrical contact and the second trace, but without electrically bridging the traces together or electrically bridging the electrical contacts together. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A composite wafer comprising:
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a semiconductor substrate comprising a plurality of at least partially unsingulated chips, each chip comprising (i) a plurality of exposed electrical contacts and (ii) a non-contact region disposed between the electrical contacts, a top surface each of the electrical contacts being substantially coplanar with or recessed below a surface of the non-contact region disposed around the electrical contact; and an anisotropic conductive adhesive (ACA) on the semiconductor substrate, including the electrical contacts and the non-contact region of each chip. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification