ANCHOR DESIGN AND METHOD FOR MEMS TRANSDUCER APPARATUSES
First Claim
1. A method of fabricating a transducer apparatus, the method comprising:
- providing a substrate member having a surface region;
forming a movable base structure having a base surface region;
removing at least one portion of the movable base structure to form a center cavity with a cavity surface region;
forming at least one center anchor structure spatially disposed within a substantially circular portion of the surface region, the center anchor structure(s) being configured within a vicinity of the center of the surface region that is within the center cavity;
forming at least one spring structure coupled to at least one portion of the cavity surface region, the spring structure(s) being coupled to the center anchor structure(s); and
forming at least one capacitor element, the capacitor element(s) being spatially disposed within a vicinity of the cavity surface region.
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0 Petitions
Accused Products
Abstract
An improved MEMS transducer apparatus and method. The method includes providing a movable base structure having a base surface region overlying a substrate and a center cavity with a cavity surface region. At least one center anchor structure and one spring structure can be spatially disposed within a substantially circular portion of the surface region. The spring structure(s) can be coupled the center anchor structure(s) to a portion of the cavity surface region. The substantially circular portion can be configured within a vicinity of the center of the surface region. At least one capacitor element, having a fixed and a movable capacitor element, can be spatially disposed within a vicinity of the cavity surface region. The fixed capacitor element(s) can be coupled to the center anchor structure(s) and the movable capacitor element(s) can be spatially disposed on a portion of the cavity surface region.
5 Citations
20 Claims
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1. A method of fabricating a transducer apparatus, the method comprising:
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providing a substrate member having a surface region; forming a movable base structure having a base surface region; removing at least one portion of the movable base structure to form a center cavity with a cavity surface region; forming at least one center anchor structure spatially disposed within a substantially circular portion of the surface region, the center anchor structure(s) being configured within a vicinity of the center of the surface region that is within the center cavity; forming at least one spring structure coupled to at least one portion of the cavity surface region, the spring structure(s) being coupled to the center anchor structure(s); and forming at least one capacitor element, the capacitor element(s) being spatially disposed within a vicinity of the cavity surface region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of fabricating a transducer apparatus, the method comprising:
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providing a substrate member having a surface region; forming a rectangular movable base structure having a base surface region; removing at least one portion of the rectangular movable base structure to form a center cavity having a cavity surface region; forming four anchor structure spatially disposed within a substantially circular portion of the surface region, the center anchor structures being configured within a vicinity of the center of the surface region within the center cavity; forming four spring structures each of which are coupled to at least one portion of the cavity surface region, the spring structures being coupled to the center anchor structures; and forming at least one capacitor element coupled to each of the center anchor structures, the capacitor elements being spatially disposed within a vicinity of the cavity surface region. - View Dependent Claims (17, 18, 19, 20)
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Specification