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MEMS DEVICE

  • US 20140026660A1
  • Filed: 07/06/2013
  • Published: 01/30/2014
  • Est. Priority Date: 07/27/2012
  • Status: Abandoned Application
First Claim
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1. A MEMS gyroscope, comprising:

  • a mass-substrate, comprising;

    a movable prof-mass; and

    a magnetic source attached to the proof-mass such that the magnetic source is capable of moving with the proof-mass; and

    a sensor substrate below the mass-substrate, comprising;

    a magnetic sensing mechanism for detecting a magnet field from the magnetic sensor, wherein the magnetic sensing mechanism is static relative to the magnetic source, wherein the magnetic sensing mechanism further comprising;

    a plurality of magnetic sensors associated with said magnetic source, wherein the plurality of magnetic sensors are deployed in the plane of the sensor substrate at different locations.

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