TRENCH-BASED POWER SEMICONDUCTOR DEVICES WITH INCREASED BREAKDOWN VOLTAGE CHARACTERISTICS
First Claim
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1. A semiconductor device comprising:
- a first plurality of parallel trenches extending in a semiconductor region, each trench having a shield electrode and a gate electrode vertically stacked therein, the shield and gate electrodes being electrically insulated from each other;
a first pad adapted to receive a first external connection and electrically coupled to the shield electrodes of the first plurality of parallel trenches;
a second pad adapted to receive a second external connection;
an electrical trace electrically coupled to the second pad and to the gate electrode of at least one trench of the first plurality of parallel trenches; and
a second plurality of parallel trenches extending in a semiconductor region and disposed under at least one of the second pad and the electrical trace, each trench of the second plurality having a first electrode disposed therein.
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Abstract
Exemplary power semiconductor devices with features providing increased breakdown voltage and other benefits are disclosed.
7 Citations
20 Claims
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1. A semiconductor device comprising:
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a first plurality of parallel trenches extending in a semiconductor region, each trench having a shield electrode and a gate electrode vertically stacked therein, the shield and gate electrodes being electrically insulated from each other; a first pad adapted to receive a first external connection and electrically coupled to the shield electrodes of the first plurality of parallel trenches; a second pad adapted to receive a second external connection; an electrical trace electrically coupled to the second pad and to the gate electrode of at least one trench of the first plurality of parallel trenches; and a second plurality of parallel trenches extending in a semiconductor region and disposed under at least one of the second pad and the electrical trace, each trench of the second plurality having a first electrode disposed therein. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification