TERMINAL STRUCTURE AND SEMICONDUCTOR DEVICE
First Claim
1. A terminal structure comprising:
- a base material;
an electrode formed on the base material;
an insulating coating layer formed on the base material and on the electrode and having an opening exposing at least part of the electrode;
an under-bump metal layer filling the opening and covering part of the insulating coating layer; and
a dome-shaped bump covering the under-bump metal layer, whereinin a cross section along a lamination direction, the under-bump metal layer has a convex shape toward the bump, and a thickness of the under-bump metal layer at a center of the opening is equal to or greater than the thickness of the under-bump metal layer at an end portion of the opening.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention relates to a terminal structure comprising; a base material 10; an external electrode 20 formed on the base material; an insulating coating layer 30 formed on the base material and on the electrode and having an opening exposing at least part of the electrode; an under-bump metal layer 70 filling the opening and covering part of the insulating coating layer; and a dome-shaped bump 85 covering the under-bump metal layer, wherein in a cross section along a lamination direction, the under-bump metal layer has a convex shape toward the bump, and the thickness Tu0 of the under-bump metal layer at a center of the opening is equal to or greater than the thickness Tu1 of the under-bump metal layer at an end portion of the opening.
8 Citations
6 Claims
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1. A terminal structure comprising:
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a base material; an electrode formed on the base material; an insulating coating layer formed on the base material and on the electrode and having an opening exposing at least part of the electrode; an under-bump metal layer filling the opening and covering part of the insulating coating layer; and a dome-shaped bump covering the under-bump metal layer, wherein in a cross section along a lamination direction, the under-bump metal layer has a convex shape toward the bump, and a thickness of the under-bump metal layer at a center of the opening is equal to or greater than the thickness of the under-bump metal layer at an end portion of the opening. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification