Fluid Delivery for Scanning Probe Microscopy
First Claim
1. A micro electromechanical systems (MEMS) device comprising:
- a scanning probe microscopy (SPM) component; and
one or more fluidic channels formed in the SPM component.
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Accused Products
Abstract
A gas (or fluid) is introduced around an SPM probe or nanotool™ to control chemical activity e.g., oxygen to promote oxidation, argon to inhibit oxidation or clean dry air (CDA) to inhibit moisture to control static charging due to the action of the probe or nanotools and to provide vacuum at and around the tip and substrate area. Electrical current can be produced for use with active electronic devices on, in or near the body of the device. In addition by use of a fluid like water, certain oils, and other liquids in conjunction with specific tip structure either electric discharge machining can be used at the tip area on the tip itself (in conjunction with a form structure on the work piece) or on a work piece beneath the tip to shape, polish and remove material at very small scales (10 microns to 1 nm or less).
2 Citations
29 Claims
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1. A micro electromechanical systems (MEMS) device comprising:
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a scanning probe microscopy (SPM) component; and one or more fluidic channels formed in the SPM component. - View Dependent Claims (2, 16, 17, 18, 19)
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3. (canceled)
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4. A micro electromechanical systems (MEMS) device comprising:
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scanning probe microscopy (SPM) component; a fluidic channel formed in the SPM component, the fluidic channel configured to deliver fluid to a tip of the SPM component; an amount of an isotope disposed along the fluidic channel, wherein the particles emitted by the isotope can be delivered by a fluid flowing in the fluidic channel to the tip to affect the charge distribution in a region about the tip. - View Dependent Claims (5, 8, 9, 10, 15)
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6. A micro electromechanical systems (MEMS) device comprising:
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scanning probe microscopy (SPM) component; an amount of an isotope disposed on the SPM component; a circuit for collecting particles emitted from the isotope to store an accumulated charge; and a contact formed on the circuit to provide an amount of current that can be produced from the accumulated charge. - View Dependent Claims (7)
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11. Any nanocavitation technique which uses an nanocavitation inducing member to image or measure the surface to which the cavitation is to interact with by a Scanning Probe Microscopy Method.
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12. Any nanoelectric discharge machining in which the electric discharge tool also serves to image or measure the surface to be machined by any Scanning Probe Microscopy Method.
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13. Any outflow, inflow, circulating or recirculating fluid system in which the Scanning Probe Microscopy means is integrated with the fluid transfer means.
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14. Any outflow, inflow, circulating or recirculating fluid system in which nanomachining or surface modification by any means is conducted by a means integrated with said means.
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20-25. -25. (canceled)
- 26. Any application, measurement or operation in which the MEMS device of 10 acts in a specific or constrained region.
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27. (canceled)
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29-35. -35. (canceled)
Specification