METHOD FOR FABRICATING GLASS SUBSTRATE PACKAGE
First Claim
1. A substrate comprising:
- a solid glass core having a first surface and a second surface opposed to said first surface;
multiple conductors extending through said solid glass core beginning at said first surface and ending at said second surface, wherein one of said conductors has a third surface and a fourth surface, wherein said third surface and said first surface are substantially coplanar, wherein said second surface and said fourth surface are substantially coplanar, wherein one of said conductors comprise a copper-tungsten alloy material, wherein said solid glass core is directly contact with said conductor; and
a first dielectric layer and a first metal layer formed at said first surface, wherein said first metal layer at the first surface is electrically coupled with one of said conductors.
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Abstract
A substrate comprising a solid glass core having a first surface and a second surface opposed to the first surface; multiple conductors extending through the solid glass core beginning at the first surface and ending at the second surface, wherein one of the conductors has a third surface and a fourth surface, wherein the third surface and the first surface are substantially coplanar, wherein the second surface and the fourth surface are substantially coplanar, wherein one of the conductors comprise a copper-tungsten alloy material, wherein the solid glass core is directly contact with the conductor; and a first dielectric layer and a first metal layer formed at the first surface, wherein the first metal layer at the first surface is electrically coupled with one of the conductors.
13 Citations
20 Claims
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1. A substrate comprising:
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a solid glass core having a first surface and a second surface opposed to said first surface; multiple conductors extending through said solid glass core beginning at said first surface and ending at said second surface, wherein one of said conductors has a third surface and a fourth surface, wherein said third surface and said first surface are substantially coplanar, wherein said second surface and said fourth surface are substantially coplanar, wherein one of said conductors comprise a copper-tungsten alloy material, wherein said solid glass core is directly contact with said conductor; and a first dielectric layer and a first metal layer formed at said first surface, wherein said first metal layer at the first surface is electrically coupled with one of said conductors. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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11. A substrate comprising:
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a solid glass core having a first surface and a second surface opposed to said first surface; multiple conductors extending through said solid glass core beginning at said first surface and ending at said second surface, wherein one of said conductors has a third surface and a fourth surface, wherein said third surface and said first surface are substantially coplanar, wherein said second surface and said fourth surface are substantially coplanar, wherein one of said conductors comprise a first metal layer and a second metal layer coated said first metal layer, wherein said solid glass core is directly contact with said conductor; and a first dielectric layer and a third metal layer formed at said first surface, wherein said first third layer at the first surface is electrically coupled with one of said conductors.
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Specification