SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD FOR MANUFACTURING SAME
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Abstract
A semiconductor light emitting device, includes: a stacked structural unit including a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, and a light emitting layer provided therebetween; and an electrode including a first and second metal layers, the first metal layer including silver or silver alloy and being provided on a side of the second semiconductor layer opposite to the light emitting layer, the second metal layer including at least one element selected from gold, platinum, palladium, rhodium, iridium, ruthenium, and osmium and being provided on a side of the first metal layer opposite to the second semiconductor layer. A concentration of the element in a region including an interface between the first and second semiconductor layers is higher than that of the element in a region of the first metal layer distal to the interface.
13 Citations
32 Claims
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1-20. -20. (canceled)
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21. A semiconductor light emitting device, comprising:
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a stacked structural unit including a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, and a light emitting layer provided between the first semiconductor layer and the second semiconductor layer, the first semiconductor layer including a nitride semiconductor, the second semiconductor layer including a nitride semiconductor; and an electrode including a first metal layer and a second metal layer, the first metal layer including silver or silver alloy and being provided on a side of the second semiconductor layer opposite to the light emitting layer, the second metal layer including at least one element selected from gold, platinum, palladium, rhodium, iridium, ruthenium, and osmium and being provided on a side of the first metal layer opposite to the second semiconductor layer, a concentration of the element in a region including an interface between the first metal layer and the second semiconductor layer being higher than a concentration of the element in a region of the first metal layer distal to the interface, wherein an average particle diameter of silver in the first metal layer is not more than 0.3 micrometers. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28)
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29. A semiconductor light emitting device, comprising:
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a stacked structural unit including a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, and a light emitting layer provided between the first semiconductor layer and the second semiconductor layer, the first semiconductor layer including a nitride semiconductor, the second semiconductor layer including a nitride semiconductor; and an electrode including a first metal layer and a second metal layer, the first metal layer including silver or silver alloy and being provided on a side of the second semiconductor layer opposite to the light emitting layer, the second metal layer including at least one element selected from gold, platinum, palladium, rhodium, iridium, ruthenium, and osmium and being provided on a side of the first metal layer opposite to the second semiconductor layer, the second semiconductor layer including an interface layer provided in contact with an interface between the second semiconductor layer and the first metal layer, the interface layer including silver, wherein an average particle diameter of silver in the first metal layer is not more than 0.3 micrometers. - View Dependent Claims (30, 31, 32)
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Specification