MICRO-ELECTRO-MECHANICAL DEVICE HAVING LOW THERMAL EXPANSION DIFFERENCE
First Claim
1. A micro-electro-mechanical device having low thermal expansion difference, comprising:
- a stationary unit, including a first capacitive sensing region and a fixed structure region;
a movable unit, including a second capacitive sensing region and a proof mass, wherein the first capacitive sensing region and the second capacitive sensing region form a capacitor, and the proof mass consists of a single material; and
a connecting member for connecting the movable unit while allowing a relative movement of the movable unit with respect to the stationary unit.
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Abstract
The invention provides a micro-electro-mechanical device which is manufactured by a CMOS manufacturing process. The micro-electro-mechanical device includes a stationary unit, a movable unit, and a connecting member. The stationary unit includes a first capacitive sensing region and a fixed structure region. The movable unit includes a second capacitive sensing region and a proof mass, wherein the first capacitive sensing region and the second capacitive sensing region form a capacitor, and the proof mass region consists of a single material. The connecting member is for connecting the movable unit in a way to allow a relative movement of the movable unit with respect to the stationary unit.
11 Citations
12 Claims
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1. A micro-electro-mechanical device having low thermal expansion difference, comprising:
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a stationary unit, including a first capacitive sensing region and a fixed structure region; a movable unit, including a second capacitive sensing region and a proof mass, wherein the first capacitive sensing region and the second capacitive sensing region form a capacitor, and the proof mass consists of a single material; and a connecting member for connecting the movable unit while allowing a relative movement of the movable unit with respect to the stationary unit. - View Dependent Claims (2, 3, 4, 5, 6, 9, 11, 12)
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7. A micro-electro-mechanical device having low thermal expansion difference, wherein the micro-electro-mechanical device comprising:
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a stationary unit, including a first capacitive sensing region and a fixed structure region; a movable unit, including a second capacitive sensing region, wherein the first capacitive sensing region and the second capacitive sensing region form a capacitor, and from top view, more than 50% of the total area of the movable unit is formed by a single material from top surface through bottom surface; and a connecting member, connecting the movable unit while allowing a relative movement of the movable unit with respect to the stationary unit. - View Dependent Claims (8, 10)
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Specification