LOW FREQUENCY IMPEDANCE MEASUREMENT WITH SOURCE MEASURE UNITS
First Claim
Patent Images
1. A method for measuring the impedance of a DUT having a capacitance of less than 1 pF, said method comprising:
- applying a voltage signal produced by a source measure unit to said DUT, said voltage signal including an AC component having a non-zero frequency of less than 1 kHz;
monitoring with said source measure unit a current signal through said DUT in response to said voltage signal;
digitizing said voltage signal and said current signal synchronously; and
calculating said impedance from said digitized voltage and current signals.
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Abstract
A method for measuring the impedance of a DUT having a capacitance of less than 1 pF includes applying a voltage or current signal to the DUT, the voltage or current signal including an AC component having a non-zero frequency of less than 1 kHz; monitoring a current or voltage signal, respectively, through the DUT in response to the voltage or current signal; digitizing the voltage signal and the current signal synchronously; and calculating the impedance from the digitized voltage and current signals.
12 Citations
22 Claims
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1. A method for measuring the impedance of a DUT having a capacitance of less than 1 pF, said method comprising:
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applying a voltage signal produced by a source measure unit to said DUT, said voltage signal including an AC component having a non-zero frequency of less than 1 kHz; monitoring with said source measure unit a current signal through said DUT in response to said voltage signal; digitizing said voltage signal and said current signal synchronously; and calculating said impedance from said digitized voltage and current signals. - View Dependent Claims (3, 6, 7)
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11. A method for measuring the impedance of a DUT having a capacitance of less than 1 pF, said method comprising:
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applying a current signal from a first source measure unit through said DUT, said current signal including an AC component having a non-zero frequency of less than 1 kHz; monitoring a voltage signal across said DUT with said first source measure unit in response to said current signal; digitizing said voltage signal and said current signal synchronously; and calculating said impedance from said digitized voltage and current signals. - View Dependent Claims (13, 16, 17)
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12. (canceled)
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21. A method for measuring the impedance of a DUT having a capacitance of less than 1 pF, said method comprising:
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applying a voltage signal produced by a first source measure unit to said DUT, said voltage signal including an AC component having a non-zero frequency of less than 1 kHz; monitoring with a second source measure unit a current signal through said DUT in response to said voltage signal;
digitizing said voltage signal and said current signal synchronously; andcalculating said impedance from said digitized voltage and current signals. - View Dependent Claims (22)
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Specification